Wafer-scale transistor arrays fabricated using slot-die printing of molybdenum disulfide and sodium-embedded alumina

  • Yonghyun Albert Kwon
  • , Jihyun Kim
  • , Sae Byeok Jo
  • , Dong Gue Roe
  • , Dongjoon Rhee
  • , Younguk Song
  • , Byoungwoo Kang
  • , Dohun Kim
  • , Jeongmin Kim
  • , Dae Woo Kim
  • , Moon Sung Kang
  • , Joohoon Kang
  • , Jeong Ho Cho

Research output: Contribution to journalArticlepeer-review

54 Scopus citations

Abstract

Two-dimensional materials made via solution processing could be used to create next-generation electronic devices at scale. However, existing solution processing methods typically have a trade-off between scalability and material quality, which makes them unsuitable for practical applications. Here we show that wafer-scale arrays of molybdenum-disulfide-based transistors can be fabricated using a commercial slot-die printing process. We create inks of molybdenum disulfide nanosheets and sodium-embedded alumina for printing of the semiconductor and gate dielectric layer, respectively. The transistors exhibit average charge carrier mobilities of 80.0 cm2 V−1 s−1 in field-effect transistor measurements and 132.9 cm2 V−1 s−1 in Hall measurements at room temperature. The high charge carrier mobility is attributed to the sodium-embedded alumina gate dielectric, which causes a band-like charge carrier transport in the molybdenum-disulfide-nanosheet-based thin-film networks. We use the transistors to create various logic gates, including NOT, NOR, NAND and static random-access memory.

Original languageEnglish
Pages (from-to)443-450
Number of pages8
JournalNature Electronics
Volume6
Issue number6
DOIs
StatePublished - Jun 2023

Bibliographical note

Publisher Copyright:
© 2023, The Author(s), under exclusive licence to Springer Nature Limited.

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