Uniformity enhancement of LC inorganic alignment layer deposited by the obliquely oriented incidence direction of sputtering

Jungho Kim; Gwang Jun Lee; Kee Jeong Yang; Hong Kun Lyu; Byeong Dae Choi

Uniformity enhancement of LC inorganic alignment layer deposited by the obliquely oriented incidence direction of sputtering

Jungho Kim
, Gwang Jun Lee
, Kee Jeong Yang
, Hong Kun Lyu
, Byeong Dae Choi

Daegu Gyeongbuk Institute of Science and Technology

Research output: Contribution to conference › Paper › peer-review

Abstract

An inorganic LC alignment layer is widely investigated because of thermal and photochemical stability of LC alignment layer. For uniform LC alignment layer, we compared the conventional oblique deposition with 2-step oblique deposition method by sputtering techniques.

Original language	English
Pages	85-87
Number of pages	3
State	Published - 2010
Event	17th International Display Workshops, IDW'10 - Fukuoka, Japan Duration: 1 Dec 2010 → 3 Dec 2010

Conference

Conference	17th International Display Workshops, IDW'10
Country/Territory	Japan
City	Fukuoka
Period	1/12/10 → 3/12/10

Cite this

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title = "Uniformity enhancement of LC inorganic alignment layer deposited by the obliquely oriented incidence direction of sputtering",

abstract = "An inorganic LC alignment layer is widely investigated because of thermal and photochemical stability of LC alignment layer. For uniform LC alignment layer, we compared the conventional oblique deposition with 2-step oblique deposition method by sputtering techniques.",

author = "Jungho Kim and Lee, \{Gwang Jun\} and Yang, \{Kee Jeong\} and Lyu, \{Hong Kun\} and Choi, \{Byeong Dae\}",

year = "2010",

language = "English",

pages = "85--87",

note = "17th International Display Workshops, IDW'10 ; Conference date: 01-12-2010 Through 03-12-2010",

}

TY - CONF

T1 - Uniformity enhancement of LC inorganic alignment layer deposited by the obliquely oriented incidence direction of sputtering

AU - Kim, Jungho

AU - Lee, Gwang Jun

AU - Yang, Kee Jeong

AU - Lyu, Hong Kun

AU - Choi, Byeong Dae

PY - 2010

Y1 - 2010

N2 - An inorganic LC alignment layer is widely investigated because of thermal and photochemical stability of LC alignment layer. For uniform LC alignment layer, we compared the conventional oblique deposition with 2-step oblique deposition method by sputtering techniques.

AB - An inorganic LC alignment layer is widely investigated because of thermal and photochemical stability of LC alignment layer. For uniform LC alignment layer, we compared the conventional oblique deposition with 2-step oblique deposition method by sputtering techniques.

UR - https://www.scopus.com/pages/publications/79956335292

M3 - Paper

AN - SCOPUS:79956335292

SP - 85

EP - 87

T2 - 17th International Display Workshops, IDW'10

Y2 - 1 December 2010 through 3 December 2010

ER -

Uniformity enhancement of LC inorganic alignment layer deposited by the obliquely oriented incidence direction of sputtering

Abstract

Conference

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