Uniformity enhancement of LC inorganic alignment layer deposited by the obliquely oriented incidence direction of sputtering

Jungho Kim, Gwang Jun Lee, Kee Jeong Yang, Hong Kun Lyu, Byeong Dae Choi

Research output: Contribution to conferencePaperpeer-review

Abstract

An inorganic LC alignment layer is widely investigated because of thermal and photochemical stability of LC alignment layer. For uniform LC alignment layer, we compared the conventional oblique deposition with 2-step oblique deposition method by sputtering techniques.

Original languageEnglish
Pages85-87
Number of pages3
StatePublished - 2010
Event17th International Display Workshops, IDW'10 - Fukuoka, Japan
Duration: 1 Dec 20103 Dec 2010

Conference

Conference17th International Display Workshops, IDW'10
Country/TerritoryJapan
CityFukuoka
Period1/12/103/12/10

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