Ultrashallow p+/n junction prepared by low energy BF3 plasma doping and KrF excimer laser annealing

  • Dongkyu Lee
  • , Sungkweon Baek
  • , Sungho Heo
  • , Changhee Cho
  • , Gyoungho Buh
  • , Taisu Park
  • , Yugyun Shin
  • , Hyunsang Hwang

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

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