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Ultrashallow p+/n junction prepared by low energy BF3 plasma doping and KrF excimer laser annealing
Dongkyu Lee, Sungkweon Baek, Sungho Heo, Changhee Cho, Gyoungho Buh, Taisu Park, Yugyun Shin, Hyunsang Hwang
Research output: Contribution to journal › Article › peer-review
2
Scopus
citations