Ultralarge-area block copolymer lithography using self-assembly assisted photoresist pre-pattern

  • Hyeong Min Jin
  • , Seong Jun Jeong
  • , Hyoung Seok Moon
  • , Bong Hoon Kim
  • , Ju Young Kim
  • , Jaeho Yu
  • , Sumi Lee
  • , Moon Gyu Lee
  • , Hwan Young Choi
  • , Sang Ouk Kim

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

3 Scopus citations

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