Abstract
Direct patterning of inorganic materials based on electro-hydrodynamic lithography (EHL) has attracted tremendous attentions as next generation soft-lithography technologies owing to its simple and cost-effective process. We show that the EHL technique based nanoscale inorganic pattern transfer coupled with ultrafast laser annealing is suitable for obtaining nanostructured TiO 2 over a large area with great fidelity. The laser annealing technique enables us to overcome a technical issue of EHL associated with long processing time and high annealing temperature. We further demonstrated the enhanced switching performance by using the laser annealed TiO2 layer as an electron transport layer in the electro-chromic device.
Original language | English |
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Article number | 053114 |
Journal | Applied Physics Letters |
Volume | 103 |
Issue number | 5 |
DOIs | |
State | Published - 29 Jul 2013 |
Bibliographical note
Funding Information:This study was supported by the Basic Science Research program (S-2011-0292-000 and 2012R1A6A1040282) through the National Research Foundation funded by the Ministry of Education. This work was also supported by the Korea Institute of Energy Technology Evaluation and Planning (KETEP) Grant (20128510010080). This research was supported by Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the MEST (2011-0022880) and by MEST & DGIST(13-BD-0404).