Ultrafast and low temperature laser annealing for crystalline TiO 2 nanostructures patterned by electro-hydrodynamic lithography

Seungnam Cha, Suok Lee, Jae Eun Jang, Arang Jang, Jin Pyo Hong, Jaejong Lee, Jung Inn Sohn, Dae Joon Kang, Jong Min Kim

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8 Scopus citations

Abstract

Direct patterning of inorganic materials based on electro-hydrodynamic lithography (EHL) has attracted tremendous attentions as next generation soft-lithography technologies owing to its simple and cost-effective process. We show that the EHL technique based nanoscale inorganic pattern transfer coupled with ultrafast laser annealing is suitable for obtaining nanostructured TiO 2 over a large area with great fidelity. The laser annealing technique enables us to overcome a technical issue of EHL associated with long processing time and high annealing temperature. We further demonstrated the enhanced switching performance by using the laser annealed TiO2 layer as an electron transport layer in the electro-chromic device.

Original languageEnglish
Article number053114
JournalApplied Physics Letters
Volume103
Issue number5
DOIs
StatePublished - 29 Jul 2013

Bibliographical note

Funding Information:
This study was supported by the Basic Science Research program (S-2011-0292-000 and 2012R1A6A1040282) through the National Research Foundation funded by the Ministry of Education. This work was also supported by the Korea Institute of Energy Technology Evaluation and Planning (KETEP) Grant (20128510010080). This research was supported by Basic Science Research Program through the National Research Foundation of Korea (NRF) funded by the MEST (2011-0022880) and by MEST & DGIST(13-BD-0404).

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