The effect of C                         60                          cluster ion beam bombardment in sputter depth profiling of organic-inorganic hybrid multiple thin films

Hyun Kyong Shon; Tae Geol Lee; Dahl Hyun Kim; Hee Jae Kang; Byoung Hoon Lee; Myung Mo Sung; Dae Won Moon

doi:10.1016/j.apsusc.2008.05.157

The effect of C ₆₀ cluster ion beam bombardment in sputter depth profiling of organic-inorganic hybrid multiple thin films

Hyun Kyong Shon, Tae Geol Lee, Dahl Hyun Kim, Hee Jae Kang, Byoung Hoon Lee, Myung Mo Sung, Dae Won Moon

Department of New Biology

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

The effects of C ₆₀ cluster ion beam bombardment in sputter depth profiling of inorganic-organic hybrid multiple nm thin films were studied. The dependence of SIMS depth profiles on sputter ion species such as 500 eV Cs ⁺ , 10 keV C ₆₀ ⁺ , 20 keV C ₆₀ ²⁺ and 30 keV C ₆₀ ³⁺ was investigated to study the effect of cluster ion bombardment on depth resolution, sputtering yield, damage accumulation, and sampling depth.

Original language	English
Pages (from-to)	1055-1057
Number of pages	3
Journal	Applied Surface Science
Volume	255
Issue number	4
DOIs	https://doi.org/10.1016/j.apsusc.2008.05.157
State	Published - 15 Dec 2008

Keywords

C cluster ion bombardment
Inorganic-organic multiple nm thin films
ToF-SIMS

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10.1016/j.apsusc.2008.05.157

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Shon, H. K., Lee, T. G., Kim, D. H., Kang, H. J., Lee, B. H., Sung, M. M., & Moon, D. W. (2008). The effect of C ₆₀ cluster ion beam bombardment in sputter depth profiling of organic-inorganic hybrid multiple thin films Applied Surface Science, 255(4), 1055-1057. https://doi.org/10.1016/j.apsusc.2008.05.157

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title = " The effect of C 60 cluster ion beam bombardment in sputter depth profiling of organic-inorganic hybrid multiple thin films ",

abstract = " The effects of C 60 cluster ion beam bombardment in sputter depth profiling of inorganic-organic hybrid multiple nm thin films were studied. The dependence of SIMS depth profiles on sputter ion species such as 500 eV Cs + , 10 keV C 60 + , 20 keV C 60 2+ and 30 keV C 60 3+ was investigated to study the effect of cluster ion bombardment on depth resolution, sputtering yield, damage accumulation, and sampling depth.",

keywords = "C cluster ion bombardment, Inorganic-organic multiple nm thin films, ToF-SIMS",

author = "Shon, {Hyun Kyong} and Lee, {Tae Geol} and Kim, {Dahl Hyun} and Kang, {Hee Jae} and Lee, {Byoung Hoon} and Sung, {Myung Mo} and Moon, {Dae Won}",

year = "2008",

month = dec,

day = "15",

doi = "10.1016/j.apsusc.2008.05.157",

language = "English",

volume = "255",

pages = "1055--1057",

journal = "Applied Surface Science",

issn = "0169-4332",

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Shon, HK, Lee, TG, Kim, DH, Kang, HJ, Lee, BH, Sung, MM & Moon, DW 2008, ' The effect of C ₆₀ cluster ion beam bombardment in sputter depth profiling of organic-inorganic hybrid multiple thin films ', Applied Surface Science, vol. 255, no. 4, pp. 1055-1057. https://doi.org/10.1016/j.apsusc.2008.05.157

The effect of C ₆₀ cluster ion beam bombardment in sputter depth profiling of organic-inorganic hybrid multiple thin films . / Shon, Hyun Kyong; Lee, Tae Geol; Kim, Dahl Hyun et al.
In: Applied Surface Science, Vol. 255, No. 4, 15.12.2008, p. 1055-1057.

Research output: Contribution to journal › Article › peer-review

TY - JOUR

T1 - The effect of C 60 cluster ion beam bombardment in sputter depth profiling of organic-inorganic hybrid multiple thin films

AU - Shon, Hyun Kyong

AU - Lee, Tae Geol

AU - Kim, Dahl Hyun

AU - Kang, Hee Jae

AU - Lee, Byoung Hoon

AU - Sung, Myung Mo

AU - Moon, Dae Won

PY - 2008/12/15

Y1 - 2008/12/15

N2 - The effects of C 60 cluster ion beam bombardment in sputter depth profiling of inorganic-organic hybrid multiple nm thin films were studied. The dependence of SIMS depth profiles on sputter ion species such as 500 eV Cs + , 10 keV C 60 + , 20 keV C 60 2+ and 30 keV C 60 3+ was investigated to study the effect of cluster ion bombardment on depth resolution, sputtering yield, damage accumulation, and sampling depth.

AB - The effects of C 60 cluster ion beam bombardment in sputter depth profiling of inorganic-organic hybrid multiple nm thin films were studied. The dependence of SIMS depth profiles on sputter ion species such as 500 eV Cs + , 10 keV C 60 + , 20 keV C 60 2+ and 30 keV C 60 3+ was investigated to study the effect of cluster ion bombardment on depth resolution, sputtering yield, damage accumulation, and sampling depth.

KW - C cluster ion bombardment

KW - Inorganic-organic multiple nm thin films

KW - ToF-SIMS

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DO - 10.1016/j.apsusc.2008.05.157

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JO - Applied Surface Science

JF - Applied Surface Science

IS - 4

ER -

The effect of C ₆₀ cluster ion beam bombardment in sputter depth profiling of organic-inorganic hybrid multiple thin films

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Keywords

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