The dielectric properties of Pb0.65Ba0.35ZrO 3 thin films applicable to microwave tunable devices

J. S. Kim, B. H. Park, T. J. Choi, S. H. Shin, J. C. Lee, M. J. Lee, S. A. Seo, I. K. Yoo

Research output: Contribution to journalArticlepeer-review

8 Scopus citations

Abstract

Pb0.65Ba0.35ZrO3 (PBZ) thin films have been grown on MgO (001) substrates by pulsed-laser deposition (PLD). We have compared the structural and dielectric properties of PBZ films grown at various temperatures. A highly c-axis oriented PBZ film has been grown on a MgO (001) substrate at the deposition temperature of 550°C and has also shown the largest tunability among all the PBZ films in capacitance-voltage measurements. The tunability and dielectric loss of the PBZ film was 20% and 0.00959, respectively. In addition, we have compared the temperature coefficient of capacitance (TCC) of a PBZ film with that of a Ba0.5Sr 0.5TiO3 (BST) film which is a well-known material applicable to tunable microwave devices. We have confirmed that TCC value of a PBZ thin film was three-times smaller than that of a BST thin film.

Original languageEnglish
Pages (from-to)205-211
Number of pages7
JournalIntegrated Ferroelectrics
Volume66
DOIs
StatePublished - 2004

Bibliographical note

Funding Information:
This work was supported by National R&D Project for Nano Science and Technology (Project M1-0212-29-0000) of MOST, and grant No. R08-2003-000-10051-0 from the Basic Research Program of the Korea Science & Engineering Foundation.

Keywords

  • BST
  • Microwave tunable device
  • PBZ
  • Pulsed laser deposition
  • TCC
  • Tunability

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