Abstract
Pb0.65Ba0.35ZrO3 (PBZ) thin films have been grown on MgO (001) substrates by pulsed-laser deposition (PLD). We have compared the structural and dielectric properties of PBZ films grown at various temperatures. A highly c-axis oriented PBZ film has been grown on a MgO (001) substrate at the deposition temperature of 550°C and has also shown the largest tunability among all the PBZ films in capacitance-voltage measurements. The tunability and dielectric loss of the PBZ film was 20% and 0.00959, respectively. In addition, we have compared the temperature coefficient of capacitance (TCC) of a PBZ film with that of a Ba0.5Sr 0.5TiO3 (BST) film which is a well-known material applicable to tunable microwave devices. We have confirmed that TCC value of a PBZ thin film was three-times smaller than that of a BST thin film.
Original language | English |
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Pages (from-to) | 205-211 |
Number of pages | 7 |
Journal | Integrated Ferroelectrics |
Volume | 66 |
DOIs | |
State | Published - 2004 |
Bibliographical note
Funding Information:This work was supported by National R&D Project for Nano Science and Technology (Project M1-0212-29-0000) of MOST, and grant No. R08-2003-000-10051-0 from the Basic Research Program of the Korea Science & Engineering Foundation.
Keywords
- BST
- Microwave tunable device
- PBZ
- Pulsed laser deposition
- TCC
- Tunability