Surface micromachined silicon photonic MEMS: A scalable technology platform for photonic network components

Niels Quack; Tae Joon Seok; Sangyoon Han; Hamed Sattari; Teodoro Graziosi; Marcell Kiss; Richard S. Muller; Ming C. Wu

doi:10.1364/NETWORKS.2018.NeM4F.1

Surface micromachined silicon photonic MEMS: A scalable technology platform for photonic network components

Niels Quack
, Tae Joon Seok
, Sangyoon Han
, Hamed Sattari
, Teodoro Graziosi
, Marcell Kiss
, Richard S. Muller
, Ming C. Wu

Department of Robotics and Mechatronics Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Abstract

Exploiting mechanical movement of surface micromachined waveguides on a passive silicon photonics platform provides scalable opportunities for efficient on-chip manipulation of optical signals in complex photonic integrated circuits for future photonic networks.

Original language	English
Title of host publication	Photonic Networks and Devices, Networks 2018
Publisher	Optica Publishing Group (formerly OSA)
ISBN (Print)	9781943580439
DOIs	https://doi.org/10.1364/NETWORKS.2018.NeM4F.1
State	Published - 2018
Event	Photonic Networks and Devices, Networks 2018 - Zurich, Switzerland Duration: 2 Jul 2018 → 5 Jul 2018

Publication series

Name	Optics InfoBase Conference Papers
Volume	Part F106-Networks 2018
ISSN (Electronic)	2162-2701

Conference

Conference	Photonic Networks and Devices, Networks 2018
Country/Territory	Switzerland
City	Zurich
Period	2/07/18 → 5/07/18

Bibliographical note

Publisher Copyright:
© 2018 The Author(s).

Access to Document

10.1364/NETWORKS.2018.NeM4F.1

Cite this

Quack, N., Seok, T. J., Han, S., Sattari, H., Graziosi, T., Kiss, M., Muller, R. S., & Wu, M. C. (2018). Surface micromachined silicon photonic MEMS: A scalable technology platform for photonic network components. In Photonic Networks and Devices, Networks 2018 (Optics InfoBase Conference Papers; Vol. Part F106-Networks 2018). Optica Publishing Group (formerly OSA). https://doi.org/10.1364/NETWORKS.2018.NeM4F.1

@inproceedings{bb450e7549bb4865a5d60bbdb00f6f99,

title = "Surface micromachined silicon photonic MEMS: A scalable technology platform for photonic network components",

abstract = "Exploiting mechanical movement of surface micromachined waveguides on a passive silicon photonics platform provides scalable opportunities for efficient on-chip manipulation of optical signals in complex photonic integrated circuits for future photonic networks.",

author = "Niels Quack and Seok, \{Tae Joon\} and Sangyoon Han and Hamed Sattari and Teodoro Graziosi and Marcell Kiss and Muller, \{Richard S.\} and Wu, \{Ming C.\}",

note = "Publisher Copyright: {\textcopyright} 2018 The Author(s).; Photonic Networks and Devices, Networks 2018 ; Conference date: 02-07-2018 Through 05-07-2018",

year = "2018",

doi = "10.1364/NETWORKS.2018.NeM4F.1",

language = "English",

isbn = "9781943580439",

series = "Optics InfoBase Conference Papers",

publisher = "Optica Publishing Group (formerly OSA)",

booktitle = "Photonic Networks and Devices, Networks 2018",

}

Quack, N, Seok, TJ, Han, S, Sattari, H, Graziosi, T, Kiss, M, Muller, RS & Wu, MC 2018, Surface micromachined silicon photonic MEMS: A scalable technology platform for photonic network components. in Photonic Networks and Devices, Networks 2018. Optics InfoBase Conference Papers, vol. Part F106-Networks 2018, Optica Publishing Group (formerly OSA), Photonic Networks and Devices, Networks 2018, Zurich, Switzerland, 2/07/18. https://doi.org/10.1364/NETWORKS.2018.NeM4F.1

Surface micromachined silicon photonic MEMS: A scalable technology platform for photonic network components. / Quack, Niels; Seok, Tae Joon; Han, Sangyoon et al.
Photonic Networks and Devices, Networks 2018. Optica Publishing Group (formerly OSA), 2018. (Optics InfoBase Conference Papers; Vol. Part F106-Networks 2018).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Surface micromachined silicon photonic MEMS

T2 - Photonic Networks and Devices, Networks 2018

AU - Quack, Niels

AU - Seok, Tae Joon

AU - Han, Sangyoon

AU - Sattari, Hamed

AU - Graziosi, Teodoro

AU - Kiss, Marcell

AU - Muller, Richard S.

AU - Wu, Ming C.

PY - 2018

Y1 - 2018

N2 - Exploiting mechanical movement of surface micromachined waveguides on a passive silicon photonics platform provides scalable opportunities for efficient on-chip manipulation of optical signals in complex photonic integrated circuits for future photonic networks.

AB - Exploiting mechanical movement of surface micromachined waveguides on a passive silicon photonics platform provides scalable opportunities for efficient on-chip manipulation of optical signals in complex photonic integrated circuits for future photonic networks.

UR - https://www.scopus.com/pages/publications/85051248267

U2 - 10.1364/NETWORKS.2018.NeM4F.1

DO - 10.1364/NETWORKS.2018.NeM4F.1

M3 - Conference contribution

AN - SCOPUS:85051248267

SN - 9781943580439

T3 - Optics InfoBase Conference Papers

BT - Photonic Networks and Devices, Networks 2018

PB - Optica Publishing Group (formerly OSA)

Y2 - 2 July 2018 through 5 July 2018

ER -

Surface micromachined silicon photonic MEMS: A scalable technology platform for photonic network components

Abstract

Publication series

Conference

Bibliographical note

Access to Document

Other files and links

Fingerprint

Cite this