Summary of ISO/TC 201 Standard: XV. ISO 20341:2003 - Surface chemical analysis - Secondary ion mass spectrometry - Method for estimating depth resolution parameters with multiple delta-layer reference materials

This International Standard specifies procedures for estimating three depth resolution parameters, via the leading-edge decay length, the trailing-edge decay length and Gaussian broadening, in SIMS depth profiling using multiple delta-layer reference materials. This International Standard is not applicable to delta-layers where the chemical and physical state of the near-surface region, modified by the incident primary ions, is not in the steady state.