Structure dependent oxidation of Al thin films for MTJ tunnel barrier

  • Y. W. Lee
  • , S. M. Yoon
  • , J. J. Lim
  • , Y. Hu
  • , C. G. Kim
  • , C. O. Kim

Research output: Contribution to journalConference articlepeer-review

Abstract

Magnetic tunnel junctions(MTJ) are fabricated as a function of the input power of Al thin film. Al thin films have pseudo-crystalline structure at 30, 60, 90 W and transform into amorphous like smooth nanocrystalline state at 120 W. Junction resistance increases as the annealing temperature increases up to 250°C and decrease at 300°C at the pseudo-crystalline barrier. When the barrier has amorphous like nanocrystalline structure, optimum annealing temperature increases up to 300°C. The barrier characteristics are strongly related with the microstructure of AlOx barrier.

Original languageEnglish
Pages (from-to)1053-1056
Number of pages4
JournalMaterials Science Forum
Volume449-452
Issue numberII
DOIs
StatePublished - 2004
EventDesigning, Processing and Properties of Advanced Engineering Materials: Proceedings on the 3rd International Symposium on Designing, Processing and Properties of Advanced Engineering Materials - Jeju Island, Korea, Republic of
Duration: 5 Nov 20038 Nov 2003

Keywords

  • AlO
  • Annealing
  • Surface morphology
  • Tunnel barrier

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