Abstract
Energetic oxygen ion bombardment induces densification and enhances the film crystallinity and refractive index of the evaporated MgO thin films. The optimum oxygen ion bombardment energy is 100 eV and its energy shows have the highest crystallinity and optical properties. The oxygen ion bombardment affects the optical properties that are dependent on the structural properties of the MgO thin films. The ion-induced secondary electron emission property is enhanced more by the cesium incorporation than by the ion beam assisted deposition. This phenomenon is a combined effect of densification of the structure and the reduction of the surface work function.
| Original language | English |
|---|---|
| Pages (from-to) | 55-59 |
| Number of pages | 5 |
| Journal | Thin Solid Films |
| Volume | 355 |
| DOIs | |
| State | Published - 1 Nov 1999 |
| Event | Proceedings of the 1999 26th International Conference on Metallurgic Coatings and Thin Films - San Diego, CA, USA Duration: 12 Apr 1999 → 15 Apr 1999 |
Bibliographical note
Funding Information:This work was sponsored by the academic research fund of Ministry of Education, Republic of Korea.