Abstract
We herein demonstrated an electrowetting liquid lens using a spherical polymeric encapsulation on coplanar electrodes. In order to vary the focal length, the conductive inner lens was actuated by applying a voltage to the pinwheel-shaped coplanar electrodes. Silicone oil with a low vapor pressure was used as a nonconductive outer liquid lens, which was spherically encapsulated by chemical vapor deposition of thin-film polymer. The use of polymeric (parylene) encapsulation with coplanar indium-tin-oxide (ITO) electrodes provides a unique advantage in achieving an improved transparency, a wafer-level packaging of the liquid lens and the convenient accessibility of the electrical signal.
| Original language | English |
|---|---|
| Article number | 6016209 |
| Pages (from-to) | 1703-1705 |
| Number of pages | 3 |
| Journal | IEEE Photonics Technology Letters |
| Volume | 23 |
| Issue number | 22 |
| DOIs | |
| State | Published - 2011 |
Bibliographical note
Funding Information:Manuscript received June 14, 2011; revised August 16, 2011; accepted September 01, 2011. Date of publication September 12, 2011; date of current version October 26, 2011. This work was supported by the World Class University program (WCU, Project R31-2008-000-10026-0) and by iMSE (the Institute of Medical System Engineering) at GIST through a grant provided by the Ministry of Education, Science and Technology (MEST), Republic of Korea.
Keywords
- Electrooptic devices
- lenses
- micro fabrication
- optical device fabrication