Size effect on the device performance of K31 type pMUTs: Experiments and equivalent circuit analysis

H. S. Choi; L. Diebler; J. L. Ding; S. Bose; A. Bandyopadhyay

doi:10.1109/ICSENS.2007.355789

Size effect on the device performance of K₃₁ type pMUTs: Experiments and equivalent circuit analysis

H. S. Choi, L. Diebler, J. L. Ding, S. Bose, A. Bandyopadhyay

Department of Robotics and Mechatronics Engineering

Washington State University

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Abstract

The objective of the current study is to investigate the size effect on the performance of piezoelectric micromachined ultrasonic transducers (pMUTs). pMUTs with twenty different dimensions were designed and fabricated. The length/width aspect ratios of the membranes range from 5 to 22. For each design, multiple samples were fabricated in order to collect statistically meaningful data. The performance of pMUTs was characterized by the impedance and phase angle measurements combined with equivalent circuit analysis. The circuit has four electrical components, L₁ (motional inductance), C₁ (motional capacitance), R₁ (motional resistance), and C₀ (parallel capacitance), and their values were determined by fitting the circuit equation to the experimental data. The experimental results showed that effective coupling coefficient (k_eff²) increase, and resonance frequency (f_s) and quality factor (Q) decrease with increasing the width of the membrane.

Original language	English
Title of host publication	2006 5th IEEE Conference on Sensors
Pages	984-987
Number of pages	4
DOIs	https://doi.org/10.1109/ICSENS.2007.355789
State	Published - 2006
Event	2006 5th IEEE Conference on Sensors - Daegu, Korea, Republic of Duration: 22 Oct 2006 → 25 Oct 2006

Publication series

Name	Proceedings of IEEE Sensors

Conference

Conference	2006 5th IEEE Conference on Sensors
Country/Territory	Korea, Republic of
City	Daegu
Period	22/10/06 → 25/10/06

Access to Document

10.1109/ICSENS.2007.355789

Cite this

@inproceedings{453da372bf36418794dc8ce315503f7d,

title = "Size effect on the device performance of K31 type pMUTs: Experiments and equivalent circuit analysis",

abstract = "The objective of the current study is to investigate the size effect on the performance of piezoelectric micromachined ultrasonic transducers (pMUTs). pMUTs with twenty different dimensions were designed and fabricated. The length/width aspect ratios of the membranes range from 5 to 22. For each design, multiple samples were fabricated in order to collect statistically meaningful data. The performance of pMUTs was characterized by the impedance and phase angle measurements combined with equivalent circuit analysis. The circuit has four electrical components, L1 (motional inductance), C1 (motional capacitance), R1 (motional resistance), and C0 (parallel capacitance), and their values were determined by fitting the circuit equation to the experimental data. The experimental results showed that effective coupling coefficient (keff2) increase, and resonance frequency (fs) and quality factor (Q) decrease with increasing the width of the membrane.",

author = "Choi, {H. S.} and L. Diebler and Ding, {J. L.} and S. Bose and A. Bandyopadhyay",

year = "2006",

doi = "10.1109/ICSENS.2007.355789",

language = "English",

isbn = "1424403766",

series = "Proceedings of IEEE Sensors",

pages = "984--987",

booktitle = "2006 5th IEEE Conference on Sensors",

note = "2006 5th IEEE Conference on Sensors ; Conference date: 22-10-2006 Through 25-10-2006",

}

Choi, HS, Diebler, L, Ding, JL, Bose, S & Bandyopadhyay, A 2006, Size effect on the device performance of K₃₁ type pMUTs: Experiments and equivalent circuit analysis. in 2006 5th IEEE Conference on Sensors., 4178784, Proceedings of IEEE Sensors, pp. 984-987, 2006 5th IEEE Conference on Sensors, Daegu, Korea, Republic of, 22/10/06. https://doi.org/10.1109/ICSENS.2007.355789

TY - GEN

T1 - Size effect on the device performance of K31 type pMUTs

T2 - 2006 5th IEEE Conference on Sensors

AU - Choi, H. S.

AU - Diebler, L.

AU - Ding, J. L.

AU - Bose, S.

AU - Bandyopadhyay, A.

PY - 2006

Y1 - 2006

N2 - The objective of the current study is to investigate the size effect on the performance of piezoelectric micromachined ultrasonic transducers (pMUTs). pMUTs with twenty different dimensions were designed and fabricated. The length/width aspect ratios of the membranes range from 5 to 22. For each design, multiple samples were fabricated in order to collect statistically meaningful data. The performance of pMUTs was characterized by the impedance and phase angle measurements combined with equivalent circuit analysis. The circuit has four electrical components, L1 (motional inductance), C1 (motional capacitance), R1 (motional resistance), and C0 (parallel capacitance), and their values were determined by fitting the circuit equation to the experimental data. The experimental results showed that effective coupling coefficient (keff2) increase, and resonance frequency (fs) and quality factor (Q) decrease with increasing the width of the membrane.

AB - The objective of the current study is to investigate the size effect on the performance of piezoelectric micromachined ultrasonic transducers (pMUTs). pMUTs with twenty different dimensions were designed and fabricated. The length/width aspect ratios of the membranes range from 5 to 22. For each design, multiple samples were fabricated in order to collect statistically meaningful data. The performance of pMUTs was characterized by the impedance and phase angle measurements combined with equivalent circuit analysis. The circuit has four electrical components, L1 (motional inductance), C1 (motional capacitance), R1 (motional resistance), and C0 (parallel capacitance), and their values were determined by fitting the circuit equation to the experimental data. The experimental results showed that effective coupling coefficient (keff2) increase, and resonance frequency (fs) and quality factor (Q) decrease with increasing the width of the membrane.

UR - http://www.scopus.com/inward/record.url?scp=50149119063&partnerID=8YFLogxK

U2 - 10.1109/ICSENS.2007.355789

DO - 10.1109/ICSENS.2007.355789

M3 - Conference contribution

AN - SCOPUS:50149119063

SN - 1424403766

SN - 9781424403769

T3 - Proceedings of IEEE Sensors

SP - 984

EP - 987

BT - 2006 5th IEEE Conference on Sensors

Y2 - 22 October 2006 through 25 October 2006

ER -