Row/column addressing of scalable silicon photonic MEMS switches

Niels Quack, Tae Joon Seok, Sangyoon Han, Wencong Zhang, Richard S. Muller, Ming C. Wu

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

1 Scopus citations

Abstract

We present a scalable silicon photonic MEMS switch with an actuation scheme requiring only 2N electrical contacts for an NxN switch matrix. Unit cell size is 145μm x 145μm and switching loss 1.5dB at 1550nm.

Original languageEnglish
Title of host publicationOMN 2015 Jerusalem - 2015 International Conference on Optical MEMS and Nanophotonics, Proceedings
PublisherIEEE Computer Society
ISBN (Electronic)9781467368346
DOIs
StatePublished - 2 Oct 2015
EventInternational Conference on Optical MEMS and Nanophotonics, OMN 2015 - Jerusalem, Israel
Duration: 2 Aug 20155 Aug 2015

Publication series

NameInternational Conference on Optical MEMS and Nanophotonics
Volume02-05-August-2015
ISSN (Print)2160-5033
ISSN (Electronic)2160-5041

Conference

ConferenceInternational Conference on Optical MEMS and Nanophotonics, OMN 2015
Country/TerritoryIsrael
CityJerusalem
Period2/08/155/08/15

Bibliographical note

Publisher Copyright:
© 2015 IEEE.

Keywords

  • MEMS
  • Optical Circuit Switch (OCS)
  • Photonic Integrated Circuit (PIC)
  • Silicon Photonics

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