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Dive into the research topics of 'Round-robin test of medium-energy ion scattering for quantitative depth profiling of ultrathin HfO2/SiO2/Si films'. Together they form a unique fingerprint.- Sort by
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Round-robin test of medium-energy ion scattering for quantitative depth profiling of ultrathin HfO2/SiO2/Si films
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Research output: Contribution to journal › Article › peer-review
6
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citations