Reliability study of digital silicon photonic MEMS switches

Tae Joon Seok; Niels Quack; Sangyoon Han; Wencong Zhang; Richard S. Muller; Ming C. Wu

doi:10.1109/Group4.2015.7305908

Reliability study of digital silicon photonic MEMS switches

Tae Joon Seok
, Niels Quack
, Sangyoon Han
, Wencong Zhang
, Richard S. Muller
, Ming C. Wu

Department of Robotics and Mechatronics Engineering

University of California at Berkeley

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

16 Scopus citations

Abstract

We report on the reliability test of 50×50 digital silicon photonic MEMS switches. The switch operates reliably over 10 billion cycles and up to 48 hours of continuous contact in ambient environment without packaging.

Original language	English
Title of host publication	2015 IEEE 12th International Conference on Group IV Photonics, GFP 2015
Publisher	IEEE Computer Society
Pages	205-206
Number of pages	2
ISBN (Electronic)	9781479982554
DOIs	https://doi.org/10.1109/Group4.2015.7305908
State	Published - 23 Oct 2015
Event	12th IEEE International Conference on Group IV Photonics, GFP 2015 - Vancouver, Canada Duration: 26 Aug 2015 → 28 Aug 2015

Publication series

Name	IEEE International Conference on Group IV Photonics GFP
Volume	2015-October
ISSN (Print)	1949-2081

Conference

Conference	12th IEEE International Conference on Group IV Photonics, GFP 2015
Country/Territory	Canada
City	Vancouver
Period	26/08/15 → 28/08/15

Bibliographical note

Publisher Copyright:
© 2015 IEEE.

Access to Document

10.1109/Group4.2015.7305908

Cite this

Seok, T. J., Quack, N., Han, S., Zhang, W., Muller, R. S., & Wu, M. C. (2015). Reliability study of digital silicon photonic MEMS switches. In 2015 IEEE 12th International Conference on Group IV Photonics, GFP 2015 (pp. 205-206). Article 7305908 (IEEE International Conference on Group IV Photonics GFP; Vol. 2015-October). IEEE Computer Society. https://doi.org/10.1109/Group4.2015.7305908

@inproceedings{344aa16bbdbc444caaf89d3f7a58106d,

title = "Reliability study of digital silicon photonic MEMS switches",

abstract = "We report on the reliability test of 50×50 digital silicon photonic MEMS switches. The switch operates reliably over 10 billion cycles and up to 48 hours of continuous contact in ambient environment without packaging.",

author = "Seok, \{Tae Joon\} and Niels Quack and Sangyoon Han and Wencong Zhang and Muller, \{Richard S.\} and Wu, \{Ming C.\}",

note = "Publisher Copyright: {\textcopyright} 2015 IEEE.; 12th IEEE International Conference on Group IV Photonics, GFP 2015 ; Conference date: 26-08-2015 Through 28-08-2015",

year = "2015",

month = oct,

day = "23",

doi = "10.1109/Group4.2015.7305908",

language = "English",

series = "IEEE International Conference on Group IV Photonics GFP",

publisher = "IEEE Computer Society",

pages = "205--206",

booktitle = "2015 IEEE 12th International Conference on Group IV Photonics, GFP 2015",

}

Seok, TJ, Quack, N, Han, S, Zhang, W, Muller, RS & Wu, MC 2015, Reliability study of digital silicon photonic MEMS switches. in 2015 IEEE 12th International Conference on Group IV Photonics, GFP 2015., 7305908, IEEE International Conference on Group IV Photonics GFP, vol. 2015-October, IEEE Computer Society, pp. 205-206, 12th IEEE International Conference on Group IV Photonics, GFP 2015, Vancouver, Canada, 26/08/15. https://doi.org/10.1109/Group4.2015.7305908

Reliability study of digital silicon photonic MEMS switches. / Seok, Tae Joon; Quack, Niels; Han, Sangyoon et al.
2015 IEEE 12th International Conference on Group IV Photonics, GFP 2015. IEEE Computer Society, 2015. p. 205-206 7305908 (IEEE International Conference on Group IV Photonics GFP; Vol. 2015-October).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Reliability study of digital silicon photonic MEMS switches

AU - Seok, Tae Joon

AU - Quack, Niels

AU - Han, Sangyoon

AU - Zhang, Wencong

AU - Muller, Richard S.

AU - Wu, Ming C.

PY - 2015/10/23

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N2 - We report on the reliability test of 50×50 digital silicon photonic MEMS switches. The switch operates reliably over 10 billion cycles and up to 48 hours of continuous contact in ambient environment without packaging.

AB - We report on the reliability test of 50×50 digital silicon photonic MEMS switches. The switch operates reliably over 10 billion cycles and up to 48 hours of continuous contact in ambient environment without packaging.

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U2 - 10.1109/Group4.2015.7305908

DO - 10.1109/Group4.2015.7305908

M3 - Conference contribution

AN - SCOPUS:84954234447

T3 - IEEE International Conference on Group IV Photonics GFP

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BT - 2015 IEEE 12th International Conference on Group IV Photonics, GFP 2015

PB - IEEE Computer Society

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ER -

Reliability study of digital silicon photonic MEMS switches

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