Relationship between optical properties and microstructure of CeO 2-SiO2 composite thin films

Won Hoe Koo; Soon Moon Jeong; Sang Hun Choi; Hong Koo Baik; Se Jong Lee; Sung Man Lee

doi:10.1116/1.1782638

Relationship between optical properties and microstructure of CeO ₂-SiO₂ composite thin films

Won Hoe Koo, Soon Moon Jeong, Sang Hun Choi, Hong Koo Baik, Se Jong Lee, Sung Man Lee

Division of Energy Techonology

Research output: Contribution to journal › Article › peer-review

13 Scopus citations

Abstract

The preparation of CeO₂-SiO₂ composite thin films using e-beam evaporation and ion beam assisted deposition was analyzed. It was observed that the refractive index of thin films exhibited a value at 20%-35%SiO₂ fraction which leads to high packing density. It was also observed that the composite thin films containing 20%-35%SiO₂ concentration had a dense and smooth amorphous surface. The results show that the composite thin films with 20%-35%SiO₂ concentration leads to a higher resistance to water absorption.

Original language	English
Pages (from-to)	2048-2051
Number of pages	4
Journal	Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films
Volume	22
Issue number	5
DOIs	https://doi.org/10.1116/1.1782638
State	Published - Sep 2004

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title = "Relationship between optical properties and microstructure of CeO 2-SiO2 composite thin films",

abstract = "The preparation of CeO2-SiO2 composite thin films using e-beam evaporation and ion beam assisted deposition was analyzed. It was observed that the refractive index of thin films exhibited a value at 20\%-35\%SiO2 fraction which leads to high packing density. It was also observed that the composite thin films containing 20\%-35\%SiO2 concentration had a dense and smooth amorphous surface. The results show that the composite thin films with 20\%-35\%SiO2 concentration leads to a higher resistance to water absorption.",

author = "Koo, \{Won Hoe\} and Jeong, \{Soon Moon\} and Choi, \{Sang Hun\} and Baik, \{Hong Koo\} and Lee, \{Se Jong\} and Lee, \{Sung Man\}",

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T1 - Relationship between optical properties and microstructure of CeO 2-SiO2 composite thin films

AU - Koo, Won Hoe

AU - Jeong, Soon Moon

AU - Choi, Sang Hun

AU - Baik, Hong Koo

AU - Lee, Se Jong

AU - Lee, Sung Man

PY - 2004/9

Y1 - 2004/9

N2 - The preparation of CeO2-SiO2 composite thin films using e-beam evaporation and ion beam assisted deposition was analyzed. It was observed that the refractive index of thin films exhibited a value at 20%-35%SiO2 fraction which leads to high packing density. It was also observed that the composite thin films containing 20%-35%SiO2 concentration had a dense and smooth amorphous surface. The results show that the composite thin films with 20%-35%SiO2 concentration leads to a higher resistance to water absorption.

AB - The preparation of CeO2-SiO2 composite thin films using e-beam evaporation and ion beam assisted deposition was analyzed. It was observed that the refractive index of thin films exhibited a value at 20%-35%SiO2 fraction which leads to high packing density. It was also observed that the composite thin films containing 20%-35%SiO2 concentration had a dense and smooth amorphous surface. The results show that the composite thin films with 20%-35%SiO2 concentration leads to a higher resistance to water absorption.

UR - https://www.scopus.com/pages/publications/8344280326

U2 - 10.1116/1.1782638

DO - 10.1116/1.1782638

M3 - Article

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SN - 0734-2101

VL - 22

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JO - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

JF - Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

IS - 5

ER -

Relationship between optical properties and microstructure of CeO ₂-SiO₂ composite thin films

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