Abstract
In this perspective on recent advances in medium-energy ion scattering (MEIS), I focus on the current issues to make MEIS a practically powerful and useful analysis technique for nanostructured materials and devices after a brief summary of MEIS, thereby highlighting the need for an extensive review on the development of MEIS methodology and its application to a wide range of contexts.
| Original language | English |
|---|---|
| Pages (from-to) | 63-67 |
| Number of pages | 5 |
| Journal | Surface and Interface Analysis |
| Volume | 52 |
| Issue number | 1-2 |
| DOIs | |
| State | Published - 1 Jan 2020 |
Bibliographical note
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