Quantitative depth profiling of nitrogen in ultrathin oxynitride film with low energy SIMS
- H. K. Shon
- , H. J. Kang
- , T. E. Hong
- , H. S. Chang
- , K. J. Kim
- , H. K. Kim
- , D. W. Moon
Research output: Contribution to journal › Article › peer-review
2
Scopus
citations