Programmable MZI Based on Si Photonic MEMS Tunable Delay Line

  • Myung S. Hong
  • , Dong U. Kim
  • , Min G. Lim
  • , Dong J. Choi
  • , Man J. Her
  • , Young J. Park
  • , Youngjae Jeong
  • , Jongwoo Park
  • , Seungjun Han
  • , Kyoungsik Yu
  • , Sangyoon Han

Research output: Contribution to journalConference articlepeer-review

Abstract

We report on a programmable MZI based on Si photonic MEMS. The device can tune FSR (0.062-0.524 nm) as well as extinction ratio (1-16 dB). Static power consumption is less than 16 nW.

Original languageEnglish
JournalOptics InfoBase Conference Papers
DOIs
StatePublished - 2022
Event2022 Conference on Lasers and Electro-Optics Pacific Rim, CLEO/PR 2022 - Sapporo, Japan
Duration: 31 Aug 20225 Sep 2022

Bibliographical note

Publisher Copyright:
© 2022 The Author(s) © IEEE 2022.

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