Abstract
We report on a programmable MZI based on Si photonic MEMS. The device can tune FSR (0.062-0.524 nm) as well as extinction ratio (1-16 dB). Static power consumption is less than 16 nW.
Original language | English |
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Journal | Optics InfoBase Conference Papers |
DOIs | |
State | Published - 2022 |
Event | 2022 Conference on Lasers and Electro-Optics Pacific Rim, CLEO/PR 2022 - Sapporo, Japan Duration: 31 Aug 2022 → 5 Sep 2022 |
Bibliographical note
Publisher Copyright:© 2022 The Author(s) © IEEE 2022.