Programmable MZI based on a silicon photonic MEMS-tunable delay line

Myung S. Hong; Min G. Lim; Dong U. Kim; Man J. Her; Young J. Park; Dong J. Choi; Youngjae Jeong; Jongwoo Park; Seungjun Han; Young Hoon Chun; Seok Chan Eom; Sangyeol Oh; Kyoungsik Yu; Sangyoon Han

doi:10.1364/OL.494414

Programmable MZI based on a silicon photonic MEMS-tunable delay line

Myung S. Hong, Min G. Lim, Dong U. Kim, Man J. Her, Young J. Park, Dong J. Choi, Youngjae Jeong, Jongwoo Park, Seungjun Han, Young Hoon Chun, Seok Chan Eom, Sangyeol Oh, Kyoungsik Yu, Sangyoon Han

Department of Robotics and Mechatronics Engineering

Research output: Contribution to journal › Article › peer-review

1 Scopus citations

Abstract

We report on a scalable and programmable integrated Mach–Zehnder interferometer (MZI) with a tunable free spectral range (FSR) and extinction ratio (ER). For the tunable path of the MZI, we designed and utilized a tunable delay line having high flexibility based on silicon photonic microelectromechanical systems (MEMS). By utilizing MEMS, the length of the delay line can be geometrically modified. In this way, there is no optical loss penalty other than the waveguide propagation loss as the number of tunable steps increases. Therefore, our device is more scalable in terms of optical loss than the previous approaches based on cascaded MZIs. In addition, the tuning energy required to reconfigure the length is only 8.46 pJ.

Original language	English
Pages (from-to)	5611-5614
Number of pages	4
Journal	Optics Letters
Volume	48
Issue number	21
DOIs	https://doi.org/10.1364/OL.494414
State	Published - 1 Nov 2023

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© 2023 Optica Publishing Group.

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title = "Programmable MZI based on a silicon photonic MEMS-tunable delay line",

abstract = "We report on a scalable and programmable integrated Mach–Zehnder interferometer (MZI) with a tunable free spectral range (FSR) and extinction ratio (ER). For the tunable path of the MZI, we designed and utilized a tunable delay line having high flexibility based on silicon photonic microelectromechanical systems (MEMS). By utilizing MEMS, the length of the delay line can be geometrically modified. In this way, there is no optical loss penalty other than the waveguide propagation loss as the number of tunable steps increases. Therefore, our device is more scalable in terms of optical loss than the previous approaches based on cascaded MZIs. In addition, the tuning energy required to reconfigure the length is only 8.46 pJ.",

author = "Hong, {Myung S.} and Lim, {Min G.} and Kim, {Dong U.} and Her, {Man J.} and Park, {Young J.} and Choi, {Dong J.} and Youngjae Jeong and Jongwoo Park and Seungjun Han and Chun, {Young Hoon} and Eom, {Seok Chan} and Sangyeol Oh and Kyoungsik Yu and Sangyoon Han",

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doi = "10.1364/OL.494414",

language = "English",

volume = "48",

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T1 - Programmable MZI based on a silicon photonic MEMS-tunable delay line

AU - Hong, Myung S.

AU - Lim, Min G.

AU - Kim, Dong U.

AU - Her, Man J.

AU - Park, Young J.

AU - Choi, Dong J.

AU - Jeong, Youngjae

AU - Park, Jongwoo

AU - Han, Seungjun

AU - Chun, Young Hoon

AU - Eom, Seok Chan

AU - Oh, Sangyeol

AU - Yu, Kyoungsik

AU - Han, Sangyoon

PY - 2023/11/1

Y1 - 2023/11/1

N2 - We report on a scalable and programmable integrated Mach–Zehnder interferometer (MZI) with a tunable free spectral range (FSR) and extinction ratio (ER). For the tunable path of the MZI, we designed and utilized a tunable delay line having high flexibility based on silicon photonic microelectromechanical systems (MEMS). By utilizing MEMS, the length of the delay line can be geometrically modified. In this way, there is no optical loss penalty other than the waveguide propagation loss as the number of tunable steps increases. Therefore, our device is more scalable in terms of optical loss than the previous approaches based on cascaded MZIs. In addition, the tuning energy required to reconfigure the length is only 8.46 pJ.

AB - We report on a scalable and programmable integrated Mach–Zehnder interferometer (MZI) with a tunable free spectral range (FSR) and extinction ratio (ER). For the tunable path of the MZI, we designed and utilized a tunable delay line having high flexibility based on silicon photonic microelectromechanical systems (MEMS). By utilizing MEMS, the length of the delay line can be geometrically modified. In this way, there is no optical loss penalty other than the waveguide propagation loss as the number of tunable steps increases. Therefore, our device is more scalable in terms of optical loss than the previous approaches based on cascaded MZIs. In addition, the tuning energy required to reconfigure the length is only 8.46 pJ.

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EP - 5614

JO - Optics Letters

JF - Optics Letters

IS - 21

ER -

Programmable MZI based on a silicon photonic MEMS-tunable delay line

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