Abstract
It is shown that point defects are predominantly generated by irradiating low energy noble gas ions onto a graphite (0001) surface. Scanning tunneling microscopic images of the graphite surface irradiated with 50 eV Ar+ ions show a structure corresponding to a point defect in which only one or two surface atoms are displaced. The process of ion penetration and trapping into the graphite is investigated as a function of ion energy in the range of 1-500 eV. Trapping efficiency rapidly increases with ion energy in the threshold region (10-100 eV), and leads to a saturation for higher energies. The penetration and trapping mechanism is discussed in relation to defect formation on the surface.
Original language | English |
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Pages (from-to) | 312-315 |
Number of pages | 4 |
Journal | Nuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms |
Volume | 67 |
Issue number | 1-4 |
DOIs | |
State | Published - 1 Apr 1992 |
Bibliographical note
Funding Information:This work was supported by the Korean Science and Engineering Foundation (1990-) and Center for Molecular Science (1991).