Piezoelectric/magnetostrictive MEMS resonant sensor array for in-plane multi-axis magnetic field detection

Hoe Joon Kim; Sibo Wang; Changting Xu; David Laughlin; Jingxi Zhu; Gianluca Piazza

doi:10.1109/MEMSYS.2017.7863352

Piezoelectric/magnetostrictive MEMS resonant sensor array for in-plane multi-axis magnetic field detection

Hoe Joon Kim
, Sibo Wang
, Changting Xu
, David Laughlin
, Jingxi Zhu
, Gianluca Piazza

Department of Robotics and Mechatronics Engineering

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

13 Scopus citations

Abstract

This paper reports the demonstration of an array of piezoelectric/magnetostrictive micro electromechanical system (MEMS) magnetic resonant sensors (PM-MRS) for multi-axis magnetic field (H-field) detection. An array of 43 MHz aluminum nitride (AlN) piezoelectric resonators vibrating along different in-plane directions (θ) but coated with a magnetostrictive layer (Fe_65.6Co_9.4B₂₅) with the same easy axis (EZ) exhibit unique mechanical/electrical responses as a function of the applied H-field and its direction, enabling a high resolution multi-axis H-field detection. The sensor design yields resonators with a high quality factor (Q ∼ 1500) and electromechanical coupling coefficient (k_t² ∼ 2%) - the highest value ever reported for an AlN PM-MRS. This sensor system paves the way for low power magnetometers that enables single-chip multi-axis H-field detection.

Original language	English
Title of host publication	2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017
Publisher	Institute of Electrical and Electronics Engineers Inc.
Pages	109-112
Number of pages	4
ISBN (Electronic)	9781509050789
DOIs	https://doi.org/10.1109/MEMSYS.2017.7863352
State	Published - 23 Feb 2017
Event	30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017 - Las Vegas, United States Duration: 22 Jan 2017 → 26 Jan 2017

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
ISSN (Print)	1084-6999

Conference

Conference	30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017
Country/Territory	United States
City	Las Vegas
Period	22/01/17 → 26/01/17

Bibliographical note

Publisher Copyright:
© 2017 IEEE.

Access to Document

10.1109/MEMSYS.2017.7863352

Cite this

Kim, H. J., Wang, S., Xu, C., Laughlin, D., Zhu, J., & Piazza, G. (2017). Piezoelectric/magnetostrictive MEMS resonant sensor array for in-plane multi-axis magnetic field detection. In 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017 (pp. 109-112). Article 7863352 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/MEMSYS.2017.7863352

Kim, Hoe Joon ; Wang, Sibo ; Xu, Changting et al. / Piezoelectric/magnetostrictive MEMS resonant sensor array for in-plane multi-axis magnetic field detection. 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc., 2017. pp. 109-112 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

@inproceedings{b7f7f2987005433bb625f10dcd293e75,

title = "Piezoelectric/magnetostrictive MEMS resonant sensor array for in-plane multi-axis magnetic field detection",

abstract = "This paper reports the demonstration of an array of piezoelectric/magnetostrictive micro electromechanical system (MEMS) magnetic resonant sensors (PM-MRS) for multi-axis magnetic field (H-field) detection. An array of 43 MHz aluminum nitride (AlN) piezoelectric resonators vibrating along different in-plane directions (θ) but coated with a magnetostrictive layer (Fe65.6Co9.4B25) with the same easy axis (EZ) exhibit unique mechanical/electrical responses as a function of the applied H-field and its direction, enabling a high resolution multi-axis H-field detection. The sensor design yields resonators with a high quality factor (Q ∼ 1500) and electromechanical coupling coefficient (kt2 ∼ 2\%) - the highest value ever reported for an AlN PM-MRS. This sensor system paves the way for low power magnetometers that enables single-chip multi-axis H-field detection.",

author = "Kim, \{Hoe Joon\} and Sibo Wang and Changting Xu and David Laughlin and Jingxi Zhu and Gianluca Piazza",

note = "Publisher Copyright: {\textcopyright} 2017 IEEE.; 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017 ; Conference date: 22-01-2017 Through 26-01-2017",

year = "2017",

month = feb,

day = "23",

doi = "10.1109/MEMSYS.2017.7863352",

language = "English",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

pages = "109--112",

booktitle = "2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017",

}

Kim, HJ, Wang, S, Xu, C, Laughlin, D, Zhu, J & Piazza, G 2017, Piezoelectric/magnetostrictive MEMS resonant sensor array for in-plane multi-axis magnetic field detection. in 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017., 7863352, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Institute of Electrical and Electronics Engineers Inc., pp. 109-112, 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017, Las Vegas, United States, 22/01/17. https://doi.org/10.1109/MEMSYS.2017.7863352

Piezoelectric/magnetostrictive MEMS resonant sensor array for in-plane multi-axis magnetic field detection. / Kim, Hoe Joon; Wang, Sibo; Xu, Changting et al.
2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc., 2017. p. 109-112 7863352 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Piezoelectric/magnetostrictive MEMS resonant sensor array for in-plane multi-axis magnetic field detection

AU - Kim, Hoe Joon

AU - Wang, Sibo

AU - Xu, Changting

AU - Laughlin, David

AU - Zhu, Jingxi

AU - Piazza, Gianluca

PY - 2017/2/23

Y1 - 2017/2/23

N2 - This paper reports the demonstration of an array of piezoelectric/magnetostrictive micro electromechanical system (MEMS) magnetic resonant sensors (PM-MRS) for multi-axis magnetic field (H-field) detection. An array of 43 MHz aluminum nitride (AlN) piezoelectric resonators vibrating along different in-plane directions (θ) but coated with a magnetostrictive layer (Fe65.6Co9.4B25) with the same easy axis (EZ) exhibit unique mechanical/electrical responses as a function of the applied H-field and its direction, enabling a high resolution multi-axis H-field detection. The sensor design yields resonators with a high quality factor (Q ∼ 1500) and electromechanical coupling coefficient (kt2 ∼ 2%) - the highest value ever reported for an AlN PM-MRS. This sensor system paves the way for low power magnetometers that enables single-chip multi-axis H-field detection.

AB - This paper reports the demonstration of an array of piezoelectric/magnetostrictive micro electromechanical system (MEMS) magnetic resonant sensors (PM-MRS) for multi-axis magnetic field (H-field) detection. An array of 43 MHz aluminum nitride (AlN) piezoelectric resonators vibrating along different in-plane directions (θ) but coated with a magnetostrictive layer (Fe65.6Co9.4B25) with the same easy axis (EZ) exhibit unique mechanical/electrical responses as a function of the applied H-field and its direction, enabling a high resolution multi-axis H-field detection. The sensor design yields resonators with a high quality factor (Q ∼ 1500) and electromechanical coupling coefficient (kt2 ∼ 2%) - the highest value ever reported for an AlN PM-MRS. This sensor system paves the way for low power magnetometers that enables single-chip multi-axis H-field detection.

UR - https://www.scopus.com/pages/publications/85015768834

U2 - 10.1109/MEMSYS.2017.7863352

DO - 10.1109/MEMSYS.2017.7863352

M3 - Conference contribution

AN - SCOPUS:85015768834

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 109

EP - 112

BT - 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017

Y2 - 22 January 2017 through 26 January 2017

ER -

Kim HJ, Wang S, Xu C, Laughlin D, Zhu J, Piazza G. Piezoelectric/magnetostrictive MEMS resonant sensor array for in-plane multi-axis magnetic field detection. In 2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017. Institute of Electrical and Electronics Engineers Inc. 2017. p. 109-112. 7863352. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMSYS.2017.7863352

Piezoelectric/magnetostrictive MEMS resonant sensor array for in-plane multi-axis magnetic field detection

Abstract

Publication series

Conference

Bibliographical note

Access to Document

Other files and links

Fingerprint

Cite this