Parallelization of thermochemical nanolithography

Keith M. Carroll; Xi Lu; Suenne Kim; Yang Gao; Hoe Joon Kim; Suhas Somnath; Laura Polloni; Roman Sordan; William P. King; Jennifer E. Curtis; Elisa Riedo

doi:10.1039/c3nr05696a

Parallelization of thermochemical nanolithography

Keith M. Carroll, Xi Lu, Suenne Kim, Yang Gao, Hoe Joon Kim, Suhas Somnath, Laura Polloni, Roman Sordan, William P. King, Jennifer E. Curtis, Elisa Riedo

Department of Robotics and Mechatronics Engineering

Research output: Contribution to journal › Article › peer-review

46 Scopus citations

Abstract

One of the most pressing technological challenges in the development of next generation nanoscale devices is the rapid, parallel, precise and robust fabrication of nanostructures. Here, we demonstrate the possibility to parallelize thermochemical nanolithography (TCNL) by employing five nano-tips for the fabrication of conjugated polymer nanostructures and graphene-based nanoribbons.

Original language	English
Pages (from-to)	1299-1304
Number of pages	6
Journal	Nanoscale
Volume	6
Issue number	3
DOIs	https://doi.org/10.1039/c3nr05696a
State	Published - 7 Feb 2014

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title = "Parallelization of thermochemical nanolithography",

abstract = "One of the most pressing technological challenges in the development of next generation nanoscale devices is the rapid, parallel, precise and robust fabrication of nanostructures. Here, we demonstrate the possibility to parallelize thermochemical nanolithography (TCNL) by employing five nano-tips for the fabrication of conjugated polymer nanostructures and graphene-based nanoribbons.",

author = "Carroll, \{Keith M.\} and Xi Lu and Suenne Kim and Yang Gao and Kim, \{Hoe Joon\} and Suhas Somnath and Laura Polloni and Roman Sordan and King, \{William P.\} and Curtis, \{Jennifer E.\} and Elisa Riedo",

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T1 - Parallelization of thermochemical nanolithography

AU - Carroll, Keith M.

AU - Lu, Xi

AU - Kim, Suenne

AU - Gao, Yang

AU - Kim, Hoe Joon

AU - Somnath, Suhas

AU - Polloni, Laura

AU - Sordan, Roman

AU - King, William P.

AU - Curtis, Jennifer E.

AU - Riedo, Elisa

PY - 2014/2/7

Y1 - 2014/2/7

N2 - One of the most pressing technological challenges in the development of next generation nanoscale devices is the rapid, parallel, precise and robust fabrication of nanostructures. Here, we demonstrate the possibility to parallelize thermochemical nanolithography (TCNL) by employing five nano-tips for the fabrication of conjugated polymer nanostructures and graphene-based nanoribbons.

AB - One of the most pressing technological challenges in the development of next generation nanoscale devices is the rapid, parallel, precise and robust fabrication of nanostructures. Here, we demonstrate the possibility to parallelize thermochemical nanolithography (TCNL) by employing five nano-tips for the fabrication of conjugated polymer nanostructures and graphene-based nanoribbons.

UR - https://www.scopus.com/pages/publications/84892643113

U2 - 10.1039/c3nr05696a

DO - 10.1039/c3nr05696a

M3 - Article

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SN - 2040-3364

VL - 6

SP - 1299

EP - 1304

JO - Nanoscale

JF - Nanoscale

IS - 3

ER -

Parallelization of thermochemical nanolithography

Abstract

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