Nanoelectromechanical switches with vertically aligned carbon nanotubes

J. E. Jang; S. N. Cha; Y. Choi; Gehan A.J. Amaratunga; D. J. Kang; D. G. Hasko; J. E. Jung; J. M. Kim

doi:10.1063/1.2077858

Nanoelectromechanical switches with vertically aligned carbon nanotubes

J. E. Jang, S. N. Cha, Y. Choi, Gehan A.J. Amaratunga, D. J. Kang, D. G. Hasko, J. E. Jung, J. M. Kim

Department of Electrical Engineering and Computer Science

Research output: Contribution to journal › Article › peer-review

181 Scopus citations

Abstract

Electromechanical switching devices have been fabricated successfully employing vertically grown multiwalled carbon nanotubes (MWCNTs) from the prepatterned catalyst dots on the patterned device electrodes. The devices show various interesting switching characteristics depending on the length and the number of MWCNTs used. The device design not only simplifies the fabrication process, but also improves the integration density greatly. The device has a great potential in realizing technically viable nanoelectromechanical systems, such as switch, memory, fingers, or grippers.

Original language	English
Article number	163114
Pages (from-to)	1-3
Number of pages	3
Journal	Applied Physics Letters
Volume	87
Issue number	16
DOIs	https://doi.org/10.1063/1.2077858
State	Published - 17 Oct 2005

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10.1063/1.2077858

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abstract = "Electromechanical switching devices have been fabricated successfully employing vertically grown multiwalled carbon nanotubes (MWCNTs) from the prepatterned catalyst dots on the patterned device electrodes. The devices show various interesting switching characteristics depending on the length and the number of MWCNTs used. The device design not only simplifies the fabrication process, but also improves the integration density greatly. The device has a great potential in realizing technically viable nanoelectromechanical systems, such as switch, memory, fingers, or grippers.",

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AU - Kang, D. J.

AU - Hasko, D. G.

AU - Jung, J. E.

AU - Kim, J. M.

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Nanoelectromechanical switches with vertically aligned carbon nanotubes

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