@inproceedings{acb68fbaff5a4d6196b879b0982d45d4,
title = "Monolithic polymer microlens arrays with anti-reflective structures using a metal annealed mask",
abstract = "This work presents a simple method for a nanofabrication of antireflective structures (AR) over the surface of polymer microlens arrays by incorporating a metal annealed mask and isotropic etching. The reflection of AR microlens is 83\% lower than that of conventional microlens.",
keywords = "antireflective structure, imaging, metal annealing, microlens arrays, resist melting (reflow)",
author = "Hyukjin Jung and Cheol Song and Jeong, \{Ki Hun\}",
year = "2011",
doi = "10.1109/OMEMS.2011.6031042",
language = "English",
isbn = "9781457703362",
series = "International Conference on Optical MEMS and Nanophotonics",
pages = "145--146",
booktitle = "Proceedings - OMN2011",
note = "16th International Conference on Optical MEMS and Nanophotonics, OMN2011 ; Conference date: 08-08-2011 Through 11-08-2011",
}