Monolithic large-scale optical switches using silicon photonic MEMS

Ming C. Wu; Sangyoon Han; Tae Joon Seok; Niels Quack

Monolithic large-scale optical switches using silicon photonic MEMS

Ming C. Wu
, Sangyoon Han
, Tae Joon Seok
, Niels Quack

Department of Robotics and Mechatronics Engineering

University of California at Berkeley

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Abstract

We report on high-port-count (50x50) fast optical circuit switches with 2.5μs response time. The switch with 2,500 MEMS switching elements have been monolithically integrated on 9×9mm² dies using silicon photonic MEMS process on 220nm silicon-on-insulators.

Original language	English
Title of host publication	2014 OptoElectronics and Communication Conference, OECC 2014 and Australian Conference on Optical Fibre Technology, ACOFT 2014
Publisher	IEEE Computer Society
Pages	625-626
Number of pages	2
ISBN (Print)	9781922107213
State	Published - 2014
Event	19th OptoElectronics and Communications Conference, OECC 2014 and the 39th Australian Conference on Optical Fibre Technology, ACOFT 2014 - Melbourne, VIC, Australia Duration: 6 Jul 2014 → 10 Jul 2014

Publication series

Name	2014 OptoElectronics and Communication Conference, OECC 2014 and Australian Conference on Optical Fibre Technology, ACOFT 2014

Conference

Conference	19th OptoElectronics and Communications Conference, OECC 2014 and the 39th Australian Conference on Optical Fibre Technology, ACOFT 2014
Country/Territory	Australia
City	Melbourne, VIC
Period	6/07/14 → 10/07/14

Cite this

Wu, M. C., Han, S., Seok, T. J., & Quack, N. (2014). Monolithic large-scale optical switches using silicon photonic MEMS. In 2014 OptoElectronics and Communication Conference, OECC 2014 and Australian Conference on Optical Fibre Technology, ACOFT 2014 (pp. 625-626). Article 6888208 (2014 OptoElectronics and Communication Conference, OECC 2014 and Australian Conference on Optical Fibre Technology, ACOFT 2014). IEEE Computer Society.

Wu, Ming C. ; Han, Sangyoon ; Seok, Tae Joon et al. / Monolithic large-scale optical switches using silicon photonic MEMS. 2014 OptoElectronics and Communication Conference, OECC 2014 and Australian Conference on Optical Fibre Technology, ACOFT 2014. IEEE Computer Society, 2014. pp. 625-626 (2014 OptoElectronics and Communication Conference, OECC 2014 and Australian Conference on Optical Fibre Technology, ACOFT 2014).

@inproceedings{350e138aae144fb7951363d317aa35bd,

title = "Monolithic large-scale optical switches using silicon photonic MEMS",

abstract = "We report on high-port-count (50x50) fast optical circuit switches with 2.5μs response time. The switch with 2,500 MEMS switching elements have been monolithically integrated on 9×9mm2 dies using silicon photonic MEMS process on 220nm silicon-on-insulators.",

author = "Wu, \{Ming C.\} and Sangyoon Han and Seok, \{Tae Joon\} and Niels Quack",

year = "2014",

language = "English",

isbn = "9781922107213",

series = "2014 OptoElectronics and Communication Conference, OECC 2014 and Australian Conference on Optical Fibre Technology, ACOFT 2014",

publisher = "IEEE Computer Society",

pages = "625--626",

booktitle = "2014 OptoElectronics and Communication Conference, OECC 2014 and Australian Conference on Optical Fibre Technology, ACOFT 2014",

note = "19th OptoElectronics and Communications Conference, OECC 2014 and the 39th Australian Conference on Optical Fibre Technology, ACOFT 2014 ; Conference date: 06-07-2014 Through 10-07-2014",

}

Wu, MC, Han, S, Seok, TJ & Quack, N 2014, Monolithic large-scale optical switches using silicon photonic MEMS. in 2014 OptoElectronics and Communication Conference, OECC 2014 and Australian Conference on Optical Fibre Technology, ACOFT 2014., 6888208, 2014 OptoElectronics and Communication Conference, OECC 2014 and Australian Conference on Optical Fibre Technology, ACOFT 2014, IEEE Computer Society, pp. 625-626, 19th OptoElectronics and Communications Conference, OECC 2014 and the 39th Australian Conference on Optical Fibre Technology, ACOFT 2014, Melbourne, VIC, Australia, 6/07/14.

Monolithic large-scale optical switches using silicon photonic MEMS. / Wu, Ming C.; Han, Sangyoon; Seok, Tae Joon et al.
2014 OptoElectronics and Communication Conference, OECC 2014 and Australian Conference on Optical Fibre Technology, ACOFT 2014. IEEE Computer Society, 2014. p. 625-626 6888208 (2014 OptoElectronics and Communication Conference, OECC 2014 and Australian Conference on Optical Fibre Technology, ACOFT 2014).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Monolithic large-scale optical switches using silicon photonic MEMS

AU - Wu, Ming C.

AU - Han, Sangyoon

AU - Seok, Tae Joon

AU - Quack, Niels

PY - 2014

Y1 - 2014

N2 - We report on high-port-count (50x50) fast optical circuit switches with 2.5μs response time. The switch with 2,500 MEMS switching elements have been monolithically integrated on 9×9mm2 dies using silicon photonic MEMS process on 220nm silicon-on-insulators.

AB - We report on high-port-count (50x50) fast optical circuit switches with 2.5μs response time. The switch with 2,500 MEMS switching elements have been monolithically integrated on 9×9mm2 dies using silicon photonic MEMS process on 220nm silicon-on-insulators.

UR - https://www.scopus.com/pages/publications/84907064874

M3 - Conference contribution

AN - SCOPUS:84907064874

SN - 9781922107213

T3 - 2014 OptoElectronics and Communication Conference, OECC 2014 and Australian Conference on Optical Fibre Technology, ACOFT 2014

SP - 625

EP - 626

BT - 2014 OptoElectronics and Communication Conference, OECC 2014 and Australian Conference on Optical Fibre Technology, ACOFT 2014

PB - IEEE Computer Society

T2 - 19th OptoElectronics and Communications Conference, OECC 2014 and the 39th Australian Conference on Optical Fibre Technology, ACOFT 2014

Y2 - 6 July 2014 through 10 July 2014

ER -

Wu MC, Han S, Seok TJ, Quack N. Monolithic large-scale optical switches using silicon photonic MEMS. In 2014 OptoElectronics and Communication Conference, OECC 2014 and Australian Conference on Optical Fibre Technology, ACOFT 2014. IEEE Computer Society. 2014. p. 625-626. 6888208. (2014 OptoElectronics and Communication Conference, OECC 2014 and Australian Conference on Optical Fibre Technology, ACOFT 2014).

Monolithic large-scale optical switches using silicon photonic MEMS

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