@inproceedings{fabf133ccb514955ad4bec85a01fe287,
title = "Monolithic 50x50 MEMS silicon photonic switches with microsecond response time",
abstract = "We report on 50x50 MEMS-actuated silicon photonic switches with 16V switching voltage and microsecond switching time. 2,500 MEMS cantilever 1x2 waveguide switches have been integrated on 9mmx9mm chips.",
author = "Sangyoon Han and Seok, \{Tae Joon\} and Niels Quack and Yoo, \{Byung wook\} and Wu, \{Ming C.\}",
year = "2014",
language = "English",
isbn = "9781557529930",
series = "Optics InfoBase Conference Papers",
publisher = "Optical Society of America",
booktitle = "Optical Fiber Communication Conference, OFC 2014",
note = "Optical Fiber Communication Conference, OFC 2014 ; Conference date: 09-03-2014 Through 13-03-2014",
}