@inproceedings{9c2268b34a28405292384f6c5e643821,
title = "Monolithic 50×50 MEMS silicon photonic switches with microsecond response time",
abstract = "We report on 50×50 MEMS-actuated silicon photonic switches with 16V switching voltage and microsecond switching time. 2,500 MEMS cantilever 1×2 waveguide switches have been integrated on 9mm×9mm chips.",
author = "Sangyoon Han and Seok, \{Tae Joon\} and Niels Quack and Yoo, \{Byung wook\} and Wu, \{Ming C.\}",
year = "2014",
month = mar,
day = "3",
doi = "10.1364/ofc.2014.m2k.2",
language = "English",
series = "Optical Fiber Communication Conference, OFC 2014",
publisher = "Optical Society of America (OSA)",
booktitle = "Optical Fiber Communication Conference, OFC 2014",
note = "Optical Fiber Communication Conference, OFC 2014 ; Conference date: 09-03-2014 Through 13-03-2014",
}