Monolithic 50×50 MEMS silicon photonic switches with microsecond response time

Sangyoon Han; Tae Joon Seok; Niels Quack; Byung Wook Yoo; Ming C. Wu

doi:10.1109/OFC.2014.6886565

Monolithic 50×50 MEMS silicon photonic switches with microsecond response time

Sangyoon Han, Tae Joon Seok, Niels Quack, Byung Wook Yoo, Ming C. Wu

Department of Robotics and Mechatronics Engineering

University of California at Berkeley

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

23 Scopus citations

Abstract

We report on 50×50 MEMS-actuated silicon photonic switches with 16V switching voltage and microsecond switching time. 2,500 MEMS cantilever 1×2 waveguide switches have been integrated on 9mm×9mm chips.

Original language	English
Title of host publication	2014 Optical Fiber Communications Conference and Exhibition, OFC 2014
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Print)	9781557529930
DOIs	https://doi.org/10.1109/OFC.2014.6886565
State	Published - 2014
Event	2014 Optical Fiber Communications Conference and Exhibition, OFC 2014 - San Francisco, CA, United States Duration: 9 Mar 2014 → 13 Mar 2014

Publication series

Name	Conference on Optical Fiber Communication, Technical Digest Series

Conference

Conference	2014 Optical Fiber Communications Conference and Exhibition, OFC 2014
Country/Territory	United States
City	San Francisco, CA
Period	9/03/14 → 13/03/14

Access to Document

10.1109/OFC.2014.6886565

Cite this

Han, S., Seok, T. J., Quack, N., Yoo, B. W., & Wu, M. C. (2014). Monolithic 50×50 MEMS silicon photonic switches with microsecond response time. In 2014 Optical Fiber Communications Conference and Exhibition, OFC 2014 Article 6886565 (Conference on Optical Fiber Communication, Technical Digest Series). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/OFC.2014.6886565

@inproceedings{f42cea8eb8f74f2c9a77463d6ed24a22,

title = "Monolithic 50×50 MEMS silicon photonic switches with microsecond response time",

abstract = "We report on 50×50 MEMS-actuated silicon photonic switches with 16V switching voltage and microsecond switching time. 2,500 MEMS cantilever 1×2 waveguide switches have been integrated on 9mm×9mm chips.",

author = "Sangyoon Han and Seok, {Tae Joon} and Niels Quack and Yoo, {Byung Wook} and Wu, {Ming C.}",

year = "2014",

doi = "10.1109/OFC.2014.6886565",

language = "English",

isbn = "9781557529930",

series = "Conference on Optical Fiber Communication, Technical Digest Series",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

booktitle = "2014 Optical Fiber Communications Conference and Exhibition, OFC 2014",

note = "2014 Optical Fiber Communications Conference and Exhibition, OFC 2014 ; Conference date: 09-03-2014 Through 13-03-2014",

}

Han, S, Seok, TJ, Quack, N, Yoo, BW & Wu, MC 2014, Monolithic 50×50 MEMS silicon photonic switches with microsecond response time. in 2014 Optical Fiber Communications Conference and Exhibition, OFC 2014., 6886565, Conference on Optical Fiber Communication, Technical Digest Series, Institute of Electrical and Electronics Engineers Inc., 2014 Optical Fiber Communications Conference and Exhibition, OFC 2014, San Francisco, CA, United States, 9/03/14. https://doi.org/10.1109/OFC.2014.6886565

Monolithic 50×50 MEMS silicon photonic switches with microsecond response time. / Han, Sangyoon; Seok, Tae Joon; Quack, Niels et al.
2014 Optical Fiber Communications Conference and Exhibition, OFC 2014. Institute of Electrical and Electronics Engineers Inc., 2014. 6886565 (Conference on Optical Fiber Communication, Technical Digest Series).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Monolithic 50×50 MEMS silicon photonic switches with microsecond response time

AU - Han, Sangyoon

AU - Seok, Tae Joon

AU - Quack, Niels

AU - Yoo, Byung Wook

AU - Wu, Ming C.

PY - 2014

Y1 - 2014

N2 - We report on 50×50 MEMS-actuated silicon photonic switches with 16V switching voltage and microsecond switching time. 2,500 MEMS cantilever 1×2 waveguide switches have been integrated on 9mm×9mm chips.

AB - We report on 50×50 MEMS-actuated silicon photonic switches with 16V switching voltage and microsecond switching time. 2,500 MEMS cantilever 1×2 waveguide switches have been integrated on 9mm×9mm chips.

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U2 - 10.1109/OFC.2014.6886565

DO - 10.1109/OFC.2014.6886565

M3 - Conference contribution

AN - SCOPUS:84907416395

SN - 9781557529930

T3 - Conference on Optical Fiber Communication, Technical Digest Series

BT - 2014 Optical Fiber Communications Conference and Exhibition, OFC 2014

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 2014 Optical Fiber Communications Conference and Exhibition, OFC 2014

Y2 - 9 March 2014 through 13 March 2014

ER -

Monolithic 50×50 MEMS silicon photonic switches with microsecond response time

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