Micromachining of FM/M/FM films using an active Q-switched Nd: YAG laser

Seong Joon Ahn; Jong Hae Kim; Dae Wook Kim; Ho Seob Kim; Young Chul Kim; Seungjoon Ahn; Cheol Gi Kim

doi:10.1002/pssb.200304627

Micromachining of FM/M/FM films using an active Q-switched Nd: YAG laser

Seong Joon Ahn, Jong Hae Kim, Dae Wook Kim, Ho Seob Kim, Young Chul Kim, Seungjoon Ahn, Cheol Gi Kim

Department of Physics and Chemistry

Sun Moon University

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

Abstract

We have optimized the operation conditions of the laser for the patterning in the FM/M/FM multi-layer, which can be readily used for the fabrication of the micro thin-film inductor. A diode-pumped Nd: YAG laser was actively Q-switched in order to obtain a high power short pulse laser beam whose spatial mode was TEM₀₀ mode. The measured pulse width was about 200 ns, its peak power was 25 kW, and the used pulse repetition rate was set to be 5 kHz. The optimal energy of a laser pulse was found to be 5 mJ and the focused beam with diameter of 5-10 μm was launched to the FM/M/FM multi-layer. Due to the high intensity of the laser beam, the major interaction between laser beam and the material is vaporization rather than melting. The pattern formed by this vaporization process was very clear and had a line width as narrow as 20 μm.

Original language	English
Pages (from-to)	1650-1653
Number of pages	4
Journal	Physica Status Solidi (B) Basic Research
Volume	241
Issue number	7
DOIs	https://doi.org/10.1002/pssb.200304627
State	Published - Jun 2004

Access to Document

10.1002/pssb.200304627

Cite this

@article{27de46ffabcb4c68b8fe8023d6c01f7a,

title = "Micromachining of FM/M/FM films using an active Q-switched Nd: YAG laser",

abstract = "We have optimized the operation conditions of the laser for the patterning in the FM/M/FM multi-layer, which can be readily used for the fabrication of the micro thin-film inductor. A diode-pumped Nd: YAG laser was actively Q-switched in order to obtain a high power short pulse laser beam whose spatial mode was TEM00 mode. The measured pulse width was about 200 ns, its peak power was 25 kW, and the used pulse repetition rate was set to be 5 kHz. The optimal energy of a laser pulse was found to be 5 mJ and the focused beam with diameter of 5-10 μm was launched to the FM/M/FM multi-layer. Due to the high intensity of the laser beam, the major interaction between laser beam and the material is vaporization rather than melting. The pattern formed by this vaporization process was very clear and had a line width as narrow as 20 μm.",

author = "Ahn, \{Seong Joon\} and Kim, \{Jong Hae\} and Kim, \{Dae Wook\} and Kim, \{Ho Seob\} and Kim, \{Young Chul\} and Seungjoon Ahn and Kim, \{Cheol Gi\}",

year = "2004",

month = jun,

doi = "10.1002/pssb.200304627",

language = "English",

volume = "241",

pages = "1650--1653",

journal = "Physica Status Solidi (B) Basic Research",

issn = "0370-1972",

publisher = "John Wiley and Sons Inc.",

number = "7",

}

TY - JOUR

T1 - Micromachining of FM/M/FM films using an active Q-switched Nd

T2 - YAG laser

AU - Ahn, Seong Joon

AU - Kim, Jong Hae

AU - Kim, Dae Wook

AU - Kim, Ho Seob

AU - Kim, Young Chul

AU - Ahn, Seungjoon

AU - Kim, Cheol Gi

PY - 2004/6

Y1 - 2004/6

N2 - We have optimized the operation conditions of the laser for the patterning in the FM/M/FM multi-layer, which can be readily used for the fabrication of the micro thin-film inductor. A diode-pumped Nd: YAG laser was actively Q-switched in order to obtain a high power short pulse laser beam whose spatial mode was TEM00 mode. The measured pulse width was about 200 ns, its peak power was 25 kW, and the used pulse repetition rate was set to be 5 kHz. The optimal energy of a laser pulse was found to be 5 mJ and the focused beam with diameter of 5-10 μm was launched to the FM/M/FM multi-layer. Due to the high intensity of the laser beam, the major interaction between laser beam and the material is vaporization rather than melting. The pattern formed by this vaporization process was very clear and had a line width as narrow as 20 μm.

AB - We have optimized the operation conditions of the laser for the patterning in the FM/M/FM multi-layer, which can be readily used for the fabrication of the micro thin-film inductor. A diode-pumped Nd: YAG laser was actively Q-switched in order to obtain a high power short pulse laser beam whose spatial mode was TEM00 mode. The measured pulse width was about 200 ns, its peak power was 25 kW, and the used pulse repetition rate was set to be 5 kHz. The optimal energy of a laser pulse was found to be 5 mJ and the focused beam with diameter of 5-10 μm was launched to the FM/M/FM multi-layer. Due to the high intensity of the laser beam, the major interaction between laser beam and the material is vaporization rather than melting. The pattern formed by this vaporization process was very clear and had a line width as narrow as 20 μm.

UR - https://www.scopus.com/pages/publications/4744352606

U2 - 10.1002/pssb.200304627

DO - 10.1002/pssb.200304627

M3 - Article

AN - SCOPUS:4744352606

SN - 0370-1972

VL - 241

SP - 1650

EP - 1653

JO - Physica Status Solidi (B) Basic Research

JF - Physica Status Solidi (B) Basic Research

IS - 7

ER -

Micromachining of FM/M/FM films using an active Q-switched Nd: YAG laser

Abstract

Access to Document

Other files and links

Fingerprint

Cite this