Abstract
We demonstrated a novel MEMS artificial basilar membrane composed of a piezoelectric beam array that mimics the passive frequency selectivity of the cochlea and exhibits acoustic-to-electrical energy conversion. Each beam was designed to have a unique resonance frequency. To determine the resonance frequencies of the beams, the displacement and piezoelectric voltage were measured by applying a periodic chirped signal with a sound pressure level of 109.7 dB. The measured resonance frequencies were in the range 10-37 kHz. The piezoelectric signal was used to modulate a finite pulse-width signal for electrical stimulation; the pulse widths were in the range 0.43-5.1 ms with sound pressure levels in the range 84.9-112.4 dB.
| Original language | English |
|---|---|
| Pages (from-to) | 6-10 |
| Number of pages | 5 |
| Journal | Sensors and Actuators, A: Physical |
| Volume | 203 |
| DOIs | |
| State | Published - 2013 |
Bibliographical note
Funding Information:This work was supported by a National Research Foundation of Korea grant funded by the Korean Government ( 2011-0013638 ).
Keywords
- Artificial basilar membrane (ABM)
- Frequency selectivity
- MEMS
- Piezoelectric acoustic sensor