@inproceedings{2c77b61c17cf42b98a6e82b21aa56ae9,
title = "Integration of Ag/AgCl reference electrode with MOSFET-type biosensor",
abstract = "A CMOS process-compatible MOSFET-type biosensor and a built-in Ag/AgCl thin film reference electrode which is able to replace the conventional voluminous Ag/AgCl glass electrode have been fabricated on the same chip. Au was used as the gate metal of the MOSFET-type biosensor in order to immobilize biomolecules. Electrical characteristics of the MOSFET-type biosensor with the built-in Ag/AgCl thin film reference electrode is quite stable and similar to the characteristics of the biosensor with the conventional Ag/AgCl glass electrode. Therefore, it is concluded that the Ag/AgCl thin film reference electrode might replace the voluminous Ag/AgCl glass reference electrode for realization of miniature biosensors and micro total analysis systems.",
author = "Choi, \{Ho Jin\} and Shin, \{Jang Kyoo\} and Pyung Choi and Lyu, \{Hong Kun\} and Kazuaki Sawada and Makoto Ishida",
year = "2007",
doi = "10.1109/IMNC.2007.4456249",
language = "English",
isbn = "4990247248",
series = "Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC",
pages = "352--353",
booktitle = "Digest of Papers - Microprocesses and Nanotechnology 2007; 20th International Microprocesses and Nanotechnology Conference, MNC",
note = "s20th International Microprocesses and Nanotechnology Conference, MNC 2007 ; Conference date: 05-11-2007 Through 08-11-2007",
}