Influences of charged dislocations on performance of III-V compound semiconductor FinFETs

Ji Hyun Hur, Myoung Jae Lee, Seong Ho Cho, Young Soo Park

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

4 Scopus citations

Abstract

We present a model for charged dislocations effects on III-V compound semiconductor based FinFETs performance. The model is developed to obtain momentum relaxation time and, from it, key device performance parameters such as effective mobility, threshold voltage, and finally saturation drain current. We find out that the charged threading edge dislocation density of a FinFET channel should be smaller than about 107 cm-2 to ignore the dislocation scattering impact on the device performance. This value is roughly one order of magnitude stricter than the previously known condition for wurtzite GaN.

Original languageEnglish
Title of host publicationGettering and Defect Engineering in Semiconductor Technology XV
PublisherTrans Tech Publications Ltd
Pages429-434
Number of pages6
ISBN (Print)9783037858240
DOIs
StatePublished - 2014
Event15th Gettering and Defect Engineering in Semiconductor Technology, GADEST 2013 - Oxford, United Kingdom
Duration: 22 Sep 201327 Sep 2013

Publication series

NameSolid State Phenomena
Volume205-206
ISSN (Print)1012-0394

Conference

Conference15th Gettering and Defect Engineering in Semiconductor Technology, GADEST 2013
Country/TerritoryUnited Kingdom
CityOxford
Period22/09/1327/09/13

Keywords

  • Dislocation
  • FinFET
  • III-V semiconductors
  • MOSFET
  • Scattering

Fingerprint

Dive into the research topics of 'Influences of charged dislocations on performance of III-V compound semiconductor FinFETs'. Together they form a unique fingerprint.

Cite this