Abstract
Piezoelectric micromachined ultrasonic transducers (pMUTs) were designed, fabricated and tested to measure resonance and anti-resonance frequencies, and quality factor. Film quality was monitored via saturation polarization, remnant polarization and coercive electric field measurements in different films. Effective coupling coefficient and device efficiency are calculated based on those measured values. Single and split top electrode pMUTs designs, X and Y, respectively, are evaluated to understand the influence of top electrode design on device performance. It was found that resonance frequency decreases with an increase in membrane width. Top electrodes, smaller than the membrane width by 10 μm, show a positive effect on the effective coupling coefficient of the pMUTs. It was found that both quality factor and device efficiency are maximized when top electrode width is the same as that of membrane width. An increase in top electrode dimension beyond the membrane decreases device performance.
| Original language | English |
|---|---|
| Pages (from-to) | 613-619 |
| Number of pages | 7 |
| Journal | Sensors and Actuators, A: Physical |
| Volume | 135 |
| Issue number | 2 |
| DOIs | |
| State | Published - 15 Apr 2007 |
Bibliographical note
Funding Information:Financial support from the Office of Naval Research (N00014-1-04-0644 and N00014-1-05-0583) is acknowledged.
Funding Information:
Amit Bandyopadhyay was born in Calcutta, India in 1967. He is a Professor at the School of Mechanical and Materials Engineering and Director of Bioengineering Research Center at Washington State University (WSU). He received his BS degree in Metallurgical Engineering from Jadavpur University (India) in 1989, MS in Metallurgy from the Indian Institute of Science (IISc) Bangalore in 1992 and PhD in Materials Science and Engineering from the University of Texas at Arlington in 1995. He was a research associate at the Center for Ceramic Research at Rutgers University from 1995 to 1997. In 1997, he joined Washington State University (WSU) as an Assistant Professor and promoted to an Associate Professor in 2001 and a Professor in 2006. In 1998, he received the Young Investigator Program award from the Office of Naval Research and in 1999, he received the CAREER award from the National Science Foundation (NSF). His research interest lies with processing and characterization of materials with special emphasis on piezoelectric and biomaterials. He has authored and co-authored more than 115 technical articles, holds 8 US patents and edited one book.
Keywords
- MEMS
- Micromachined ultrasonic transducers
- PZT
- Silicon membranes