Identification of donor deactivation centers in heavily As-doped Si using time-of-flight medium-energy ion scattering spectroscopy
- Won Ja Min
- , Kyungsu Park
- , Kyu Sang Yu
- , Sungjung Joo
- , Yong Sung Kim
- , Dae Won Moon
Research output: Contribution to journal › Article › peer-review
2
Scopus
citations