Identification of donor deactivation centers in heavily As-doped Si using time-of-flight medium-energy ion scattering spectroscopy

  • Won Ja Min
  • , Kyungsu Park
  • , Kyu Sang Yu
  • , Sungjung Joo
  • , Yong Sung Kim
  • , Dae Won Moon

Research output: Contribution to journal › Article › peer-review

2 Scopus citations

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