High resolution phosphor screening method for full-color field emission display applications

J. E. Jang, J. H. Gwak, Y. W. Jin, S. J. Lee, S. H. Park, J. E. Jung, N. S. Lee, J. M. Kim

Research output: Contribution to journalArticlepeer-review

27 Scopus citations

Abstract

The high-resolution polyvinyl alcohol-slurry phosphor screening technology, developed for full-color field emission displays (FED), is presented. ZnS:Cu,Al, Y2O2:Eu, and ZnS:Ag,Cl phosphors are used to examine the feasibility of the technology for green, red, and blue emissions, respectively. The spin coating speeds and ultraviolet photolithography exposure time are also examined with the firing temperature-, time- and ambient gas-dependence of the luminescence properties of the phosphors to obtain optimal screening and firing conditions, respectively.

Original languageEnglish
Pages (from-to)1106-1110
Number of pages5
JournalJournal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures
Volume18
Issue number2
DOIs
StatePublished - Mar 2000

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