Abstract
The high-resolution polyvinyl alcohol-slurry phosphor screening technology, developed for full-color field emission displays (FED), is presented. ZnS:Cu,Al, Y2O2:Eu, and ZnS:Ag,Cl phosphors are used to examine the feasibility of the technology for green, red, and blue emissions, respectively. The spin coating speeds and ultraviolet photolithography exposure time are also examined with the firing temperature-, time- and ambient gas-dependence of the luminescence properties of the phosphors to obtain optimal screening and firing conditions, respectively.
| Original language | English |
|---|---|
| Pages (from-to) | 1106-1110 |
| Number of pages | 5 |
| Journal | Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures |
| Volume | 18 |
| Issue number | 2 |
| DOIs | |
| State | Published - Mar 2000 |