High Precision Mass Sensing of In-Liquid Particles using CNT coated Quartz Crystal Microbalance

Il Ryu Jang; Jeonhyeong Park; Hoe Joon Kim

doi:10.1109/SENSORS43011.2019.8956841

High Precision Mass Sensing of In-Liquid Particles using CNT coated Quartz Crystal Microbalance

Il Ryu Jang
, Jeonhyeong Park
, Hoe Joon Kim

Department of Robotics and Mechatronics Engineering

Daegu Gyeongbuk Institute of Science and Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

4 Scopus citations

Abstract

This paper presents the integration of a thin film Carbon Nanotubes (CNTs) on a Quartz Crystal Microbalance (QCM) for an accurate mass sensing of in-liquid particles. Although a QCM is an economic solution for the mass sensing of solid thin films, QMCs generally become unreliable for in-liquid particles analysis due to a rather complex fluidic motions and coffee ring effect of liquid droplets. Specifically, uncontrollable agglomerations of particles hinder a stable QCM operation and ultimately limit its mass sensitivity. The introduced CNT layer induces a controllable nm-resolution roughness on QCMs, and such roughness affects the nucleation behavior of ionic particles and attachment parameters of colloids, ultimately improving the particle adhesion for a stable QCM operation. CNT-QCMs exhibits a mass sensing range of up to over 10 μg with about 40 pg measurement resolution. Moreover, CNT-QCMs maintain higher quality factor (Q) compared to the bare QCM, and such improvement in Q could directly determine the power budget and noise performances of the QCM integrated oscillators or sensor systems. We believe our work can contribute to build an advanced sensor systems for water quality monitoring, detection of metal ion concentration in semiconductor processing, and even for aerosol particle analysis.

Original language	English
Title of host publication	2019 IEEE Sensors, SENSORS 2019 - Conference Proceedings
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781728116341
DOIs	https://doi.org/10.1109/SENSORS43011.2019.8956841
State	Published - Oct 2019
Event	18th IEEE Sensors, SENSORS 2019 - Montreal, Canada Duration: 27 Oct 2019 → 30 Oct 2019

Publication series

Name	Proceedings of IEEE Sensors
Volume	2019-October
ISSN (Print)	1930-0395
ISSN (Electronic)	2168-9229

Conference

Conference	18th IEEE Sensors, SENSORS 2019
Country/Territory	Canada
City	Montreal
Period	27/10/19 → 30/10/19

Bibliographical note

Publisher Copyright:
© 2019 IEEE.

Keywords

Quartz Crystal Microbalance
Salinity Sensor
carbon nanotubes
liquid particle sensing
mass sensor

Access to Document

10.1109/SENSORS43011.2019.8956841

Cite this

Jang, I. R., Park, J., & Kim, H. J. (2019). High Precision Mass Sensing of In-Liquid Particles using CNT coated Quartz Crystal Microbalance. In 2019 IEEE Sensors, SENSORS 2019 - Conference Proceedings Article 8956841 (Proceedings of IEEE Sensors; Vol. 2019-October). Institute of Electrical and Electronics Engineers Inc.. https://doi.org/10.1109/SENSORS43011.2019.8956841

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title = "High Precision Mass Sensing of In-Liquid Particles using CNT coated Quartz Crystal Microbalance",

abstract = "This paper presents the integration of a thin film Carbon Nanotubes (CNTs) on a Quartz Crystal Microbalance (QCM) for an accurate mass sensing of in-liquid particles. Although a QCM is an economic solution for the mass sensing of solid thin films, QMCs generally become unreliable for in-liquid particles analysis due to a rather complex fluidic motions and coffee ring effect of liquid droplets. Specifically, uncontrollable agglomerations of particles hinder a stable QCM operation and ultimately limit its mass sensitivity. The introduced CNT layer induces a controllable nm-resolution roughness on QCMs, and such roughness affects the nucleation behavior of ionic particles and attachment parameters of colloids, ultimately improving the particle adhesion for a stable QCM operation. CNT-QCMs exhibits a mass sensing range of up to over 10 μg with about 40 pg measurement resolution. Moreover, CNT-QCMs maintain higher quality factor (Q) compared to the bare QCM, and such improvement in Q could directly determine the power budget and noise performances of the QCM integrated oscillators or sensor systems. We believe our work can contribute to build an advanced sensor systems for water quality monitoring, detection of metal ion concentration in semiconductor processing, and even for aerosol particle analysis.",

keywords = "Quartz Crystal Microbalance, Salinity Sensor, carbon nanotubes, liquid particle sensing, mass sensor",

author = "Jang, \{Il Ryu\} and Jeonhyeong Park and Kim, \{Hoe Joon\}",

note = "Publisher Copyright: {\textcopyright} 2019 IEEE.; 18th IEEE Sensors, SENSORS 2019 ; Conference date: 27-10-2019 Through 30-10-2019",

year = "2019",

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doi = "10.1109/SENSORS43011.2019.8956841",

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Jang, IR, Park, J & Kim, HJ 2019, High Precision Mass Sensing of In-Liquid Particles using CNT coated Quartz Crystal Microbalance. in 2019 IEEE Sensors, SENSORS 2019 - Conference Proceedings., 8956841, Proceedings of IEEE Sensors, vol. 2019-October, Institute of Electrical and Electronics Engineers Inc., 18th IEEE Sensors, SENSORS 2019, Montreal, Canada, 27/10/19. https://doi.org/10.1109/SENSORS43011.2019.8956841

High Precision Mass Sensing of In-Liquid Particles using CNT coated Quartz Crystal Microbalance. / Jang, Il Ryu; Park, Jeonhyeong; Kim, Hoe Joon.
2019 IEEE Sensors, SENSORS 2019 - Conference Proceedings. Institute of Electrical and Electronics Engineers Inc., 2019. 8956841 (Proceedings of IEEE Sensors; Vol. 2019-October).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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N2 - This paper presents the integration of a thin film Carbon Nanotubes (CNTs) on a Quartz Crystal Microbalance (QCM) for an accurate mass sensing of in-liquid particles. Although a QCM is an economic solution for the mass sensing of solid thin films, QMCs generally become unreliable for in-liquid particles analysis due to a rather complex fluidic motions and coffee ring effect of liquid droplets. Specifically, uncontrollable agglomerations of particles hinder a stable QCM operation and ultimately limit its mass sensitivity. The introduced CNT layer induces a controllable nm-resolution roughness on QCMs, and such roughness affects the nucleation behavior of ionic particles and attachment parameters of colloids, ultimately improving the particle adhesion for a stable QCM operation. CNT-QCMs exhibits a mass sensing range of up to over 10 μg with about 40 pg measurement resolution. Moreover, CNT-QCMs maintain higher quality factor (Q) compared to the bare QCM, and such improvement in Q could directly determine the power budget and noise performances of the QCM integrated oscillators or sensor systems. We believe our work can contribute to build an advanced sensor systems for water quality monitoring, detection of metal ion concentration in semiconductor processing, and even for aerosol particle analysis.

AB - This paper presents the integration of a thin film Carbon Nanotubes (CNTs) on a Quartz Crystal Microbalance (QCM) for an accurate mass sensing of in-liquid particles. Although a QCM is an economic solution for the mass sensing of solid thin films, QMCs generally become unreliable for in-liquid particles analysis due to a rather complex fluidic motions and coffee ring effect of liquid droplets. Specifically, uncontrollable agglomerations of particles hinder a stable QCM operation and ultimately limit its mass sensitivity. The introduced CNT layer induces a controllable nm-resolution roughness on QCMs, and such roughness affects the nucleation behavior of ionic particles and attachment parameters of colloids, ultimately improving the particle adhesion for a stable QCM operation. CNT-QCMs exhibits a mass sensing range of up to over 10 μg with about 40 pg measurement resolution. Moreover, CNT-QCMs maintain higher quality factor (Q) compared to the bare QCM, and such improvement in Q could directly determine the power budget and noise performances of the QCM integrated oscillators or sensor systems. We believe our work can contribute to build an advanced sensor systems for water quality monitoring, detection of metal ion concentration in semiconductor processing, and even for aerosol particle analysis.

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KW - Salinity Sensor

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KW - liquid particle sensing

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AN - SCOPUS:85078698502

T3 - Proceedings of IEEE Sensors

BT - 2019 IEEE Sensors, SENSORS 2019 - Conference Proceedings

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 18th IEEE Sensors, SENSORS 2019

Y2 - 27 October 2019 through 30 October 2019

ER -

High Precision Mass Sensing of In-Liquid Particles using CNT coated Quartz Crystal Microbalance

Abstract

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