High performance ZnO nanowire field effect transistor

S. N. Cha, J. E. Jang, Y. Choi, G. W. Ho, D. J. Kang, D. G. Hasko, M. E. Welland, G. A.J. Amaratunga

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

6 Scopus citations

Abstract

A zinc oxide (ZnO) nanowire field effect transistor having the highest mobility and lowest subthreshold slope obtained to date (from ZnO) is reported. The device consists of a single nanowire with self-aligned gate electrodes having well defined nano scale spacing, independent of lithographic definition. The fabricated device exhibits a transconductance of 3.06 μS, a mobility of 450 cm2/Vs and a subthreshold swing of 129 mV/decade. The transistor also shows an on/off current ratio of 106.

Original languageEnglish
Title of host publicationProceedings of ESSDERC 2005
Subtitle of host publication35th European Solid-State Device Research Conference
Pages217-220
Number of pages4
DOIs
StatePublished - 2005
EventESSDERC 2005: 35th European Solid-State Device Research Conference - Grenoble, France
Duration: 12 Sep 200516 Sep 2005

Publication series

NameProceedings of ESSDERC 2005: 35th European Solid-State Device Research Conference
Volume2005

Conference

ConferenceESSDERC 2005: 35th European Solid-State Device Research Conference
Country/TerritoryFrance
CityGrenoble
Period12/09/0516/09/05

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