High-current-density CuOx/InZnOx thin-film diodes for cross-point memory applications

Bo Soo Kang, Seung Eon Ahn, Myoung Jae Lee, Genrikh Stefanovich, Ki Hwan Kim, Wen Xu Xianyu, Chang Bum Lee, Youngsoo Park, In Gyu Back, Bae Ho Park

Research output: Contribution to journalArticlepeer-review

115 Scopus citations

Abstract

A study was conducted to demonstrate the physical properties of amorphous thin-film p-CuO/n-InZnOx heterojunction diodes that can be used as a switch element in high-density cross-point resistive memory. The study demonstrated that the film is applicable to a stackable structure or polymer memory,as it is deposited at room temperature. It was demonstrated that the diode shows significant rectification properties, such as a forward current density of 3.5 × 104 A cm-2 and a rectifying ratio of 106 at ∓2.45 V. The composition of each layer of of the CuO and IZO films grown on SiO2/Si substrates,was confirmed by Rutherford backscattering spectroscopy (RBS).

Original languageEnglish
Pages (from-to)3066-3069
Number of pages4
JournalAdvanced Materials
Volume20
Issue number16
DOIs
StatePublished - 18 Aug 2008

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