Fully Tunable Fabry-Perot Cavity on Silicon Photonic MEMS with 10 nW Static Power Consumption

Young J. Park; Man J. Her; Dong U. Kim; Dong J. Choi; Min G. Lim; Myung S. Hong; Sangyoon Han

Fully Tunable Fabry-Perot Cavity on Silicon Photonic MEMS with 10 nW Static Power Consumption

Young J. Park
, Man J. Her
, Dong U. Kim
, Dong J. Choi
, Min G. Lim
, Myung S. Hong
, Sangyoon Han

Department of Robotics and Mechatronics Engineering

Daegu Gyeongbuk Institute of Science and Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

We report on a fully tunable Fabry-Perot cavity on the silicon photonic MEMS having only 10nW static power. Its resonance wavelength is tunable over the full FSR, and its transmissivity is tunable up to 3.8dB.

Original language	English
Title of host publication	2023 Conference on Lasers and Electro-Optics, CLEO 2023
Publisher	Institute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)	9781957171258
State	Published - 2023
Event	2023 Conference on Lasers and Electro-Optics, CLEO 2023 - San Jose, United States Duration: 7 May 2023 → 12 May 2023

Publication series

Name	2023 Conference on Lasers and Electro-Optics, CLEO 2023

Conference

Conference	2023 Conference on Lasers and Electro-Optics, CLEO 2023
Country/Territory	United States
City	San Jose
Period	7/05/23 → 12/05/23

Bibliographical note

Publisher Copyright:
© Optica Publishing Group 2023 © 2023 The Author(s)

Cite this

Park, Y. J., Her, M. J., Kim, D. U., Choi, D. J., Lim, M. G., Hong, M. S., & Han, S. (2023). Fully Tunable Fabry-Perot Cavity on Silicon Photonic MEMS with 10 nW Static Power Consumption. In 2023 Conference on Lasers and Electro-Optics, CLEO 2023 Article STu3J.2 (2023 Conference on Lasers and Electro-Optics, CLEO 2023). Institute of Electrical and Electronics Engineers Inc..

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title = "Fully Tunable Fabry-Perot Cavity on Silicon Photonic MEMS with 10 nW Static Power Consumption",

abstract = "We report on a fully tunable Fabry-Perot cavity on the silicon photonic MEMS having only 10nW static power. Its resonance wavelength is tunable over the full FSR, and its transmissivity is tunable up to 3.8dB.",

author = "Park, \{Young J.\} and Her, \{Man J.\} and Kim, \{Dong U.\} and Choi, \{Dong J.\} and Lim, \{Min G.\} and Hong, \{Myung S.\} and Sangyoon Han",

note = "Publisher Copyright: {\textcopyright} Optica Publishing Group 2023 {\textcopyright} 2023 The Author(s); 2023 Conference on Lasers and Electro-Optics, CLEO 2023 ; Conference date: 07-05-2023 Through 12-05-2023",

year = "2023",

language = "English",

series = "2023 Conference on Lasers and Electro-Optics, CLEO 2023",

publisher = "Institute of Electrical and Electronics Engineers Inc.",

booktitle = "2023 Conference on Lasers and Electro-Optics, CLEO 2023",

}

Park, YJ, Her, MJ, Kim, DU, Choi, DJ, Lim, MG, Hong, MS & Han, S 2023, Fully Tunable Fabry-Perot Cavity on Silicon Photonic MEMS with 10 nW Static Power Consumption. in 2023 Conference on Lasers and Electro-Optics, CLEO 2023., STu3J.2, 2023 Conference on Lasers and Electro-Optics, CLEO 2023, Institute of Electrical and Electronics Engineers Inc., 2023 Conference on Lasers and Electro-Optics, CLEO 2023, San Jose, United States, 7/05/23.

Fully Tunable Fabry-Perot Cavity on Silicon Photonic MEMS with 10 nW Static Power Consumption. / Park, Young J.; Her, Man J.; Kim, Dong U. et al.
2023 Conference on Lasers and Electro-Optics, CLEO 2023. Institute of Electrical and Electronics Engineers Inc., 2023. STu3J.2 (2023 Conference on Lasers and Electro-Optics, CLEO 2023).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Fully Tunable Fabry-Perot Cavity on Silicon Photonic MEMS with 10 nW Static Power Consumption

AU - Park, Young J.

AU - Her, Man J.

AU - Kim, Dong U.

AU - Choi, Dong J.

AU - Lim, Min G.

AU - Hong, Myung S.

AU - Han, Sangyoon

PY - 2023

Y1 - 2023

N2 - We report on a fully tunable Fabry-Perot cavity on the silicon photonic MEMS having only 10nW static power. Its resonance wavelength is tunable over the full FSR, and its transmissivity is tunable up to 3.8dB.

AB - We report on a fully tunable Fabry-Perot cavity on the silicon photonic MEMS having only 10nW static power. Its resonance wavelength is tunable over the full FSR, and its transmissivity is tunable up to 3.8dB.

UR - https://www.scopus.com/pages/publications/85176357528

M3 - Conference contribution

AN - SCOPUS:85176357528

T3 - 2023 Conference on Lasers and Electro-Optics, CLEO 2023

BT - 2023 Conference on Lasers and Electro-Optics, CLEO 2023

PB - Institute of Electrical and Electronics Engineers Inc.

T2 - 2023 Conference on Lasers and Electro-Optics, CLEO 2023

Y2 - 7 May 2023 through 12 May 2023

ER -

Fully Tunable Fabry-Perot Cavity on Silicon Photonic MEMS with 10 nW Static Power Consumption

Abstract

Publication series

Conference

Bibliographical note

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