Fully Tunable Fabry-Pérot Cavity on Silicon Photonic MEMS with 10 nW Static Power Consumption

Young J. Park; Man J. Her; Dong U. Kim; Dong J. Choi; Min G. Lim; Myung S. Hong; Sangyoon Han

doi:10.1364/CLEO_AT.2023.STu3J.2

Fully Tunable Fabry-Pérot Cavity on Silicon Photonic MEMS with 10 nW Static Power Consumption

Young J. Park
, Man J. Her
, Dong U. Kim
, Dong J. Choi
, Min G. Lim
, Myung S. Hong
, Sangyoon Han

Department of Robotics and Mechatronics Engineering

Daegu Gyeongbuk Institute of Science and Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

1 Scopus citations

Abstract

We report on a fully tunable Fabry-Pérot cavity on the silicon photonic MEMS having only 10nW static power. Its resonance wavelength is tunable over the full FSR, and its transmissivity is tunable up to 3.8dB.

Original language	English
Title of host publication	CLEO
Subtitle of host publication	Science and Innovations, CLEO:S and I 2023
Publisher	Optical Society of America
ISBN (Electronic)	9781957171258
DOIs	https://doi.org/10.1364/CLEO_AT.2023.STu3J.2
State	Published - 2023
Event	CLEO: Science and Innovations, CLEO:S and I 2023 - Part of Conference on Lasers and Electro-Optics 2023 - San Jose, United States Duration: 7 May 2023 → 12 May 2023

Publication series

Name	CLEO: Science and Innovations, CLEO:S and I 2023

Conference

Conference	CLEO: Science and Innovations, CLEO:S and I 2023 - Part of Conference on Lasers and Electro-Optics 2023
Country/Territory	United States
City	San Jose
Period	7/05/23 → 12/05/23

Bibliographical note

Publisher Copyright:
© 2023 The Author (s).

Access to Document

10.1364/CLEO_AT.2023.STu3J.2

Cite this

@inproceedings{3d4e3cb51c1e46ad8791d4355dca7bdf,

title = "Fully Tunable Fabry-P{\'e}rot Cavity on Silicon Photonic MEMS with 10 nW Static Power Consumption",

abstract = "We report on a fully tunable Fabry-P{\'e}rot cavity on the silicon photonic MEMS having only 10nW static power. Its resonance wavelength is tunable over the full FSR, and its transmissivity is tunable up to 3.8dB.",

author = "Park, \{Young J.\} and Her, \{Man J.\} and Kim, \{Dong U.\} and Choi, \{Dong J.\} and Lim, \{Min G.\} and Hong, \{Myung S.\} and Sangyoon Han",

note = "Publisher Copyright: {\textcopyright} 2023 The Author (s).; CLEO: Science and Innovations, CLEO:S and I 2023 - Part of Conference on Lasers and Electro-Optics 2023 ; Conference date: 07-05-2023 Through 12-05-2023",

year = "2023",

doi = "10.1364/CLEO\_AT.2023.STu3J.2",

language = "English",

series = "CLEO: Science and Innovations, CLEO:S and I 2023",

publisher = "Optical Society of America",

booktitle = "CLEO",

}

Park, YJ, Her, MJ, Kim, DU, Choi, DJ, Lim, MG, Hong, MS & Han, S 2023, Fully Tunable Fabry-Pérot Cavity on Silicon Photonic MEMS with 10 nW Static Power Consumption. in CLEO: Science and Innovations, CLEO:S and I 2023. CLEO: Science and Innovations, CLEO:S and I 2023, Optical Society of America, CLEO: Science and Innovations, CLEO:S and I 2023 - Part of Conference on Lasers and Electro-Optics 2023, San Jose, United States, 7/05/23. https://doi.org/10.1364/CLEO_AT.2023.STu3J.2

Fully Tunable Fabry-Pérot Cavity on Silicon Photonic MEMS with 10 nW Static Power Consumption. / Park, Young J.; Her, Man J.; Kim, Dong U. et al.
CLEO: Science and Innovations, CLEO:S and I 2023. Optical Society of America, 2023. (CLEO: Science and Innovations, CLEO:S and I 2023).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Fully Tunable Fabry-Pérot Cavity on Silicon Photonic MEMS with 10 nW Static Power Consumption

AU - Park, Young J.

AU - Her, Man J.

AU - Kim, Dong U.

AU - Choi, Dong J.

AU - Lim, Min G.

AU - Hong, Myung S.

AU - Han, Sangyoon

PY - 2023

Y1 - 2023

N2 - We report on a fully tunable Fabry-Pérot cavity on the silicon photonic MEMS having only 10nW static power. Its resonance wavelength is tunable over the full FSR, and its transmissivity is tunable up to 3.8dB.

AB - We report on a fully tunable Fabry-Pérot cavity on the silicon photonic MEMS having only 10nW static power. Its resonance wavelength is tunable over the full FSR, and its transmissivity is tunable up to 3.8dB.

UR - https://www.scopus.com/pages/publications/85191473929

U2 - 10.1364/CLEO_AT.2023.STu3J.2

DO - 10.1364/CLEO_AT.2023.STu3J.2

M3 - Conference contribution

AN - SCOPUS:85191473929

T3 - CLEO: Science and Innovations, CLEO:S and I 2023

BT - CLEO

PB - Optical Society of America

T2 - CLEO: Science and Innovations, CLEO:S and I 2023 - Part of Conference on Lasers and Electro-Optics 2023

Y2 - 7 May 2023 through 12 May 2023

ER -

Fully Tunable Fabry-Pérot Cavity on Silicon Photonic MEMS with 10 nW Static Power Consumption

Abstract

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Conference

Bibliographical note

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