Forming time of conducting channels in double-layer Pt/Ta2O 5/TaOx/Pt and single-layer Pt/TaOx/Pt resistance memories

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Abstract

Oxide double-layer systems have recently attracted much attention, owing to their excellent performance as nonvolatile bipolar resistance memory. In this study, we measured the time required to form conducting channels (i.e., the forming time) in double-layer Pt/Ta2O5/TaOx/Pt cells and single-layer Pt/TaOx/Pt cells by applying a pulse-waveform voltage signal. The voltage amplitude dependence of forming times in both samples revealed nonlinearities with nine orders ofmagnitude. Byinvestigating their temperature dependence, wefound that channel formation for both samples can be attributed to thermally assisted dielectric breakdown.

Original languageEnglish
Pages (from-to)190-193
Number of pages4
JournalThin Solid Films
Volume540
DOIs
StatePublished - 1 Jul 2013

Bibliographical note

Funding Information:
This work was supported by the Research Center Program of Institute for Basic Science [Grant No. EM1203 ] and the National Research Foundation [(B.S.K.) Grant No. 2012-0001684 ] in Korea.

Keywords

  • Dielectric breakdown
  • Resistance random-access memory (RRAM)
  • Resistance switching

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