Forming process of unipolar resistance switching in Ta2O 5-x thin films

Shin Buhm Lee, Hyang Keun Yoo, Bo Soo Kang

Research output: Contribution to journalArticlepeer-review

Abstract

We investigated the film-thickness and ambient oxygen-pressure dependence of the electric field, EF, required to initiate unipolar resistance switching (URS) in Ta2O5-x thin films. We measured the dependence of EF by applying a triangular-waveform voltage signal to the film over a wide sweep-rate range (v = 20 mV s-1 to 5 MV s -1). Our results showed that the URS-EF was not influenced by the Ta2O5-x film thickness nor ambient oxygen-pressure. This suggested that the URS-forming process in Ta 2O5-x thin films should be governed by thermally assisted dielectric breakdown in our measurement range.

Original languageEnglish
Pages (from-to)1172-1174
Number of pages3
JournalCurrent Applied Physics
Volume13
Issue number7
DOIs
StatePublished - 2013

Keywords

  • Dielectric breakdown
  • Resistance random-access memory (RRAM)
  • Resistance switching

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