Formation of low resistance nonalloyed Ti/Au ohmic contacts to n-type ZnO by KrF excimer laser irradiation

Min Suk Oh; Sang Ho Kim; Dae Kue Hwang; Seong Ju Park; Tae Yeon Seong

doi:10.1149/1.2056447

Formation of low resistance nonalloyed Ti/Au ohmic contacts to n-type ZnO by KrF excimer laser irradiation

Min Suk Oh, Sang Ho Kim, Dae Kue Hwang, Seong Ju Park, Tae Yeon Seong

Division of Energy Techonology

Research output: Contribution to journal › Article › peer-review

17 Scopus citations

Abstract

We report on the formation of high-quality nonalloyed Ti (30 nm)/Au (50 nm) ohmic contacts to n-type ZnO:Al using laser irradiation treatment. The electrical characteristics of the Ti/Au contacts are considerably improved when laser-irradiated. The specific contact resistances are measured to be ∼ 10^-4 Ω cm² when the ZnO layers were laser irradiated, which is about two orders of magnitude lower than that of the as-grown sample. Based on electrical and X-ray photoelectron spectroscopy results, a possible mechanism for the laser-irradiation-induced improvement is described.

Original language	English
Pages (from-to)	G317-G319
Journal	Electrochemical and Solid-State Letters
Volume	8
Issue number	11
DOIs	https://doi.org/10.1149/1.2056447
State	Published - 2005

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title = "Formation of low resistance nonalloyed Ti/Au ohmic contacts to n-type ZnO by KrF excimer laser irradiation",

abstract = "We report on the formation of high-quality nonalloyed Ti (30 nm)/Au (50 nm) ohmic contacts to n-type ZnO:Al using laser irradiation treatment. The electrical characteristics of the Ti/Au contacts are considerably improved when laser-irradiated. The specific contact resistances are measured to be ∼ 10-4 Ω cm2 when the ZnO layers were laser irradiated, which is about two orders of magnitude lower than that of the as-grown sample. Based on electrical and X-ray photoelectron spectroscopy results, a possible mechanism for the laser-irradiation-induced improvement is described.",

author = "Oh, {Min Suk} and Kim, {Sang Ho} and Hwang, {Dae Kue} and Park, {Seong Ju} and Seong, {Tae Yeon}",

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T1 - Formation of low resistance nonalloyed Ti/Au ohmic contacts to n-type ZnO by KrF excimer laser irradiation

AU - Oh, Min Suk

AU - Kim, Sang Ho

AU - Hwang, Dae Kue

AU - Park, Seong Ju

AU - Seong, Tae Yeon

PY - 2005

Y1 - 2005

N2 - We report on the formation of high-quality nonalloyed Ti (30 nm)/Au (50 nm) ohmic contacts to n-type ZnO:Al using laser irradiation treatment. The electrical characteristics of the Ti/Au contacts are considerably improved when laser-irradiated. The specific contact resistances are measured to be ∼ 10-4 Ω cm2 when the ZnO layers were laser irradiated, which is about two orders of magnitude lower than that of the as-grown sample. Based on electrical and X-ray photoelectron spectroscopy results, a possible mechanism for the laser-irradiation-induced improvement is described.

AB - We report on the formation of high-quality nonalloyed Ti (30 nm)/Au (50 nm) ohmic contacts to n-type ZnO:Al using laser irradiation treatment. The electrical characteristics of the Ti/Au contacts are considerably improved when laser-irradiated. The specific contact resistances are measured to be ∼ 10-4 Ω cm2 when the ZnO layers were laser irradiated, which is about two orders of magnitude lower than that of the as-grown sample. Based on electrical and X-ray photoelectron spectroscopy results, a possible mechanism for the laser-irradiation-induced improvement is described.

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JO - Electrochemical and Solid-State Letters

JF - Electrochemical and Solid-State Letters

IS - 11

ER -

Formation of low resistance nonalloyed Ti/Au ohmic contacts to n-type ZnO by KrF excimer laser irradiation

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