Fabrication of a nanoelectromechanical switch using a suspended carbon nanotube

S. N. Cha, J. E. Jang, Y. Choi, G. A.J. Amaratunga, D. J. Kang, D. G. Hasko, J. E. Jung, J. M. Kim

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102 Scopus citations

Abstract

Fabrication and characterization of a nanoelectromechanical switching device consisting of a suspended multiwalled carbon nanotube and self-aligned electrodes is reported. The device has a triode structure and is designed so that a suspended carbon nanotube is mechanically switched to one of two self-aligned electrodes by repulsive electrostatic forces between the nanotube and the other self-aligned electrode. Carbon nanotubes are dispersed on an Si O2 coated Si wafer and their locations recorded using a scanning electron microscope mapping process. Contact electrodes and self-aligned deflection electrodes are formed by a process comprising electron beam lithography, metallic thin film deposition, and lift-off. The electrical measurements show well-defined ON and OFF states with change of gate voltage. The measured threshold voltage for electromechanical switching is ~3.6 V.

Original languageEnglish
Article number083105
Pages (from-to)1-3
Number of pages3
JournalApplied Physics Letters
Volume86
Issue number8
DOIs
StatePublished - 21 Feb 2005

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