Fabrication of a nanoelectromechanical switch using a suspended carbon nanotube

S. N. Cha; J. E. Jang; Y. Choi; G. A.J. Amaratunga; D. J. Kang; D. G. Hasko; J. E. Jung; J. M. Kim

doi:10.1063/1.1868064

Fabrication of a nanoelectromechanical switch using a suspended carbon nanotube

S. N. Cha, J. E. Jang, Y. Choi, G. A.J. Amaratunga, D. J. Kang, D. G. Hasko, J. E. Jung, J. M. Kim

Department of Electrical Engineering and Computer Science

Research output: Contribution to journal › Article › peer-review

102 Scopus citations

Abstract

Fabrication and characterization of a nanoelectromechanical switching device consisting of a suspended multiwalled carbon nanotube and self-aligned electrodes is reported. The device has a triode structure and is designed so that a suspended carbon nanotube is mechanically switched to one of two self-aligned electrodes by repulsive electrostatic forces between the nanotube and the other self-aligned electrode. Carbon nanotubes are dispersed on an Si O2 coated Si wafer and their locations recorded using a scanning electron microscope mapping process. Contact electrodes and self-aligned deflection electrodes are formed by a process comprising electron beam lithography, metallic thin film deposition, and lift-off. The electrical measurements show well-defined ON and OFF states with change of gate voltage. The measured threshold voltage for electromechanical switching is ~3.6 V.

Original language	English
Article number	083105
Pages (from-to)	1-3
Number of pages	3
Journal	Applied Physics Letters
Volume	86
Issue number	8
DOIs	https://doi.org/10.1063/1.1868064
State	Published - 21 Feb 2005

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abstract = "Fabrication and characterization of a nanoelectromechanical switching device consisting of a suspended multiwalled carbon nanotube and self-aligned electrodes is reported. The device has a triode structure and is designed so that a suspended carbon nanotube is mechanically switched to one of two self-aligned electrodes by repulsive electrostatic forces between the nanotube and the other self-aligned electrode. Carbon nanotubes are dispersed on an Si O2 coated Si wafer and their locations recorded using a scanning electron microscope mapping process. Contact electrodes and self-aligned deflection electrodes are formed by a process comprising electron beam lithography, metallic thin film deposition, and lift-off. The electrical measurements show well-defined ON and OFF states with change of gate voltage. The measured threshold voltage for electromechanical switching is ~3.6 V.",

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AU - Cha, S. N.

AU - Jang, J. E.

AU - Choi, Y.

AU - Amaratunga, G. A.J.

AU - Kang, D. J.

AU - Hasko, D. G.

AU - Jung, J. E.

AU - Kim, J. M.

PY - 2005/2/21

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AB - Fabrication and characterization of a nanoelectromechanical switching device consisting of a suspended multiwalled carbon nanotube and self-aligned electrodes is reported. The device has a triode structure and is designed so that a suspended carbon nanotube is mechanically switched to one of two self-aligned electrodes by repulsive electrostatic forces between the nanotube and the other self-aligned electrode. Carbon nanotubes are dispersed on an Si O2 coated Si wafer and their locations recorded using a scanning electron microscope mapping process. Contact electrodes and self-aligned deflection electrodes are formed by a process comprising electron beam lithography, metallic thin film deposition, and lift-off. The electrical measurements show well-defined ON and OFF states with change of gate voltage. The measured threshold voltage for electromechanical switching is ~3.6 V.

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Fabrication of a nanoelectromechanical switch using a suspended carbon nanotube

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